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Crystalline Phase Control in ScxAlx-1N Grown by Molecular Beam Epitaxy

Published online by Cambridge University Press:  30 July 2021

Andrew Lang ,
Matthew Hardy ,
Brian Downey ,
Eric Jin ,
Neeraj Nepal ,
D. Scott Katzer ,
David Meyer  and
Rhonda Stroud
Andrew Lang
Affiliation:
U.S. Naval Research Laboratory, United States
Matthew Hardy
Affiliation:
U.S. Naval Research Laboratory, United States
Brian Downey
Affiliation:
U.S. Naval Research Laboratory, United States
Eric Jin
Affiliation:
U.S. Naval Research Laboratory, United States
Neeraj Nepal
Affiliation:
U.S. Naval Research Laboratory, United States
D. Scott Katzer
Affiliation:
U.S. Naval Research Laboratory, United States
David Meyer
Affiliation:
U.S. Naval Research Laboratory, United States
Rhonda Stroud
Affiliation:
U.S. Naval Research Laboratory, United States

Abstract

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Type
Advanced Imaging and Spectroscopy for Nanoscale Materials Characterization
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 2880 - 2881
Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Hardy, M., Jin, E., Nepal, N., Katzter, D. S. et al. 2020 Appl. Phys. Express 13 065509CrossRefGoogle Scholar
Akiyama, M., Kano, K., Teshigahara, A., Appl. Phys. Lett., 95 (2009) 162107CrossRefGoogle Scholar
Fichtner, S., Wolff, N., Lofink, N., et al. , Appl. Phys., 125 (2019) 114103CrossRefGoogle Scholar