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Controlled Self-organization on Germanium Using Focused Ion Beam (FIB): From Quasi-periodic Nanoripples to Well-ordered Periodic Nanostructures

Published online by Cambridge University Press:  30 July 2020

Bhaveshkumar Kamaliya ,
Vivek Garg ,
Rakesh Mote ,
Mohammed Aslam  and
Jing Fu
Bhaveshkumar Kamaliya
Affiliation:
IITB Monash Research Academy, Mumbai, Maharashtra, India
Vivek Garg
Affiliation:
IITB Monash Research Academy, Mumbai, Maharashtra, India
Rakesh Mote
Affiliation:
Indian Institute of Technology Bombay, Mumbai, Maharashtra, India
Mohammed Aslam
Affiliation:
Indian Institute of Technology Bombay, Mumbai, Maharashtra, India
Jing Fu
Affiliation:
Monash University, Clayton, Victoria, Australia

Abstract

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Type
FIB-SEM Technology and Electron Tomography for Materials Science and Engineering
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 1684 - 1687
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Copyright
Copyright © Microscopy Society of America 2020

References

Kamaliya, B., Mote, R. G., Aslam, M., and Fu, J., “Enhanced light trapping by focused ion beam (FIB) induced self-organized nanoripples on germanium (100) surface,” APL Materials 6, 036106 (2018).10.1063/1.5021735CrossRefGoogle Scholar
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Garg, V., Kamaliya, B., Singh, R. K., Panwar, A. S., Fu, J., and Mote, R. G., “Controlled Manipulation and Multiscale Modeling of Suspended Silicon Nanostructures under Site-Specific Ion Irradiation,” ACS Applied Materials & Interfaces 12, 6581–6589 (2020).10.1021/acsami.9b17941CrossRefGoogle ScholarPubMed
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The presented work was financially supported by IITB-Monash Research Academy, IRCC (Seed grant: Spons/ME/I14079-1/2014), IIT Bombay, NCPRE-II (funded through MNRE, Government of India) and Monash Engineering Seed Fund. This work was performed in part at IIT Bombay, the School of Chemistry (Monash University) and the Melbourne Centre for Nanofabrication (MCN) in the Victorian Node of the Australian National Fabrication Facility (ANFF).Google Scholar