In ion irradiation damage studies on ceramics, damage evolution is often assessed using Rutherford backscattering spectroscopy and ion channeling (RBS/C) techniques. In a typical experiment, a single crystal ceramic sample is irradiated with heavy ions and then the crystal is exposed to He ions along a low-index crystallographic orientation. Simultaneously, the backscattered He ion yield is measured as a function of ion energy loss. For He ions scattered from the heavy ion irradiated volume, the He ion yield increases in proportion to the heavy ion dose. The RBS/C yield rises because the He ion beam is dechanneled by, for instance, interstitial point defects and clusters and their associated strain fields. A quantitative measure of dechanneling is denoted by χmin, defined as the ratio of the He ion yield along a low-index crystal orientation, to the yield obtained in a random (non-channeling) orientation. The damage parameter xmin varies from 0 to 1, where 1 represents the maximum damage level that can be measured by RBS/C.