Hostname: page-component-848d4c4894-4rdrl Total loading time: 0 Render date: 2024-06-27T21:38:14.978Z Has data issue: false hasContentIssue false

Combined plasma FIB-SEM

Published online by Cambridge University Press:  23 November 2012

J. Jiruse
Affiliation:
R&D Physics, TESCAN, a.s., Brno, Czech Republic
T. Hrncir
Affiliation:
R&D Physics, TESCAN, a.s., Brno, Czech Republic
F. Lopour
Affiliation:
R&D Physics, TESCAN, a.s., Brno, Czech Republic
M. Zadrazil
Affiliation:
R&D Physics, TESCAN, a.s., Brno, Czech Republic
A. Delobe
Affiliation:
Orsay Physics, Fuveau, France
O. Salord
Affiliation:
Orsay Physics, Fuveau, France
Get access

Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Copyright
Copyright © Microscopy Society of America 2012

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)