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Characterization of Ultra Low-K Dielectric Materials by STEM EELS Elemental Mapping

Published online by Cambridge University Press:  23 September 2015

Wayne W. Zhao ,
Michael Gribelyuk  and
Jeremy D. Russell

Abstract

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Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 2075 - 2076
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Maex, K., et al., J. Appl. Phys Vol. 93 (2003). pp 8793–8800.Google Scholar
[2] Zhao, W., et al., Microscopy & Microanalysis Vol. 20(Supplement 3 (2014). pp. 362–363.Google Scholar
[3] Zhao, W., Gribelyuk, M., et al., Proc. 38th International Symposium for Testing and Failure Analysis (2012). pp. 347–355.Google Scholar
[4] Zhao, W., et al., Microscopy & Microanalysis Vol. 20(Supplement 3 (2014). pp. 1000–1001.CrossRefGoogle Scholar
[5] Zhao, W., et al., Microscopy & Microanalysis Vol. 19(Supplement 2 (2013). pp. 902–903.Google Scholar
[6] Zhao, W., Symp. Proc. the Material Research Society, 2002 Fall Meeting (2002) Vol. 738, pp. G7.15.1–6.Google Scholar
[7] Leapman, R. & Hunt, J., Microscopy, Microanalysis, Microstructure Vol. 2 (1991). pp 231–244.CrossRefGoogle Scholar
[8] Harrach, H., et al., Microscopy & Microanalysis Vol. 16(Supplement 2 (2010). pp. 1312–1313.Google Scholar
[9] http://www.gatan.com/products/sem-imaging-spectroscopy/digiscan-ii-system.Google Scholar