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Characterization of III/V Semiconductors on Silicon by Analyzing 4D-STEM Data with Convolutional Neural Networks

Published online by Cambridge University Press:  30 July 2021

Damien Heimes ,
Jonas Scheunert ,
Andreas Beyer ,
Jürgen Belz ,
Saleh Firoozabadi  and
Kerstin Volz
Damien Heimes
Affiliation:
Materials Science Centre and Department of Physics, Philipps University Marburg, Hans-Meerwein-Straße 6, Marburg, 35032, Germany, Germany
Jonas Scheunert
Affiliation:
STRL, University of Marburg, Germany
Andreas Beyer
Affiliation:
Materials Science Centre and Department of Physics, Philipps University Marburg, Hans-Meerwein-Straße 6, Marburg, 35032, Germany, Germany
Jürgen Belz
Affiliation:
STRL, University of Marburg, Germany
Saleh Firoozabadi
Affiliation:
Materials Science Centre and Department of Physics, Philipps University Marburg, Hans-Meerwein-Straße 6, Marburg, 35032, Germany, Marburg, Hessen, Germany
Kerstin Volz
Affiliation:
Materials Science Centre and Department of Physics, Philipps University Marburg, Hans-Meerwein-Straße 6, Marburg, 35032, Germany, Germany

Abstract

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Type
Full System and Workflow Automation for Enabling Big Data and Machine Learning in Electron Microscopy
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 450 - 452
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Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

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