Hostname: page-component-7479d7b7d-jwnkl Total loading time: 0 Render date: 2024-07-11T11:54:09.923Z Has data issue: false hasContentIssue false
  • English
  • Français

Characterization of Cl-Implanted Al Films with STEM-EDS Spectral Imaging

Published online by Cambridge University Press:  01 August 2005

D Elswick ,
J J Hren ,
P G Kotula  and
N A Missert
D Elswick
Affiliation:
North Carolina State University
J J Hren
Affiliation:
North Carolina State University
P G Kotula
Affiliation:
Sandia National Laboratories , Albuquerque, New Mexico
N A Missert
Affiliation:
Sandia National Laboratories , Albuquerque, New Mexico

Extract

Core share and HTML view are not available for this content. However, as you have access to this content, a full PDF is available via the ‘Save PDF’ action button.

Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 432 - 433
Copyright
© 2005 Microscopy Society of America