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Characterization of Cl-Implanted Al Films with STEM-EDS Spectral Imaging

Published online by Cambridge University Press:  01 August 2005

D Elswick ,
J J Hren ,
P G Kotula  and
N A Missert
D Elswick
Affiliation:
North Carolina State University
J J Hren
Affiliation:
North Carolina State University
P G Kotula
Affiliation:
Sandia National Laboratories , Albuquerque, New Mexico
N A Missert
Affiliation:
Sandia National Laboratories , Albuquerque, New Mexico

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 432 - 433
Copyright
© 2005 Microscopy Society of America