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Challenges and Opportunities in Characterizing Modern Nano-Devices

Published online by Cambridge University Press:  01 August 2010

L Pan ,
X Lin ,
B Miner  and
K Johnson
L Pan
Affiliation:
Intel Corporation
X Lin
Affiliation:
Intel Corporation
B Miner
Affiliation:
Intel Corporation
K Johnson
Affiliation:
Intel Corporation

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 1906 - 1907
Copyright
Copyright © Microscopy Society of America 2010