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Cathodoluminescence Microcharacterization of the Irradiation Sensitive Defect Structure of Amorphous Silicon Dioxide

Published online by Cambridge University Press:  02 July 2020

M.A. Stevens Kalceff ,
M.R. Phillips  and
A.R. Moon
M.A. Stevens Kalceff
Affiliation:
Microstructural Analysis Unit, University of Technology, Sydney, PO 123, Broadway NSW 2007, Australiamarion@phys.uts.edu.au
M.R. Phillips
Affiliation:
Microstructural Analysis Unit, University of Technology, Sydney, PO 123, Broadway NSW 2007, Australiamarion@phys.uts.edu.au
A.R. Moon
Affiliation:
Microstructural Analysis Unit, University of Technology, Sydney, PO 123, Broadway NSW 2007, Australiamarion@phys.uts.edu.au
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Cathodoluminescence (CL) Microscopy (imaging) and Spectroscopy in a Scanning Electron Microscope enables high spatial resolution, high sensitivity detection of defect centers in materials. Cathodoluminescence microanalysis has been used to investigate the irradiation sensitive defect structure of Types I, II, III and IV amorphous silicon dioxide SiO2 (quartz and silica glasses). The CL experiments were performed in a JEOL JSM 35C SEM equipped with Oxford Instruments liquid N and liquid He cryogenic stages, and an Oxford Instruments MonoCL cathodoluminescence imaging and spectral analysis system. The observed CL emissions, were excited with a stationary electron beam at normal incidence and corrected for total instrument response. The corrected CL spectra were fitted with a multiparameter Gaussian function using a non linear least squares curve fitting algorithm and were identified with particular defect structures. The CL emission from high quality pure amorphous silica and quartz glasses is dominated by intrinsic processes (associated with the host lattice). See Table 1.

Type
Ceramics and Ceramic Composites
Information
Microscopy and Microanalysis , Volume 3 , Issue S2: Proceedings: Microscopy & Microanalysis '97, Microscopy Society of America 55th Annual Meeting, Microbeam Analysis Society 31st Annual Meeting, Histochemical Society 48th Annual Meeting, Cleveland, Ohio, August 10-14, 1997 , August 1997 , pp. 751 - 752
Copyright
Copyright © Microscopy Society of America 1997

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References

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