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“Casino V2.0 : An Advance Simulation Tool for Scanning Electron Microscope Users”

Published online by Cambridge University Press:  02 July 2020

D. Drouin ,
A.R. Couture  and
R. Gauvin
D. Drouin
Affiliation:
Départmenet de génie électrique et génie informatique, Université de Sherbrooke, Sherbrooke, Québec, J1K 2R1, Canada.
A.R. Couture
Affiliation:
Départmenet de génie électrique et génie informatique, Université de Sherbrooke, Sherbrooke, Québec, J1K 2R1, Canada.
R. Gauvin
Affiliation:
Départmenet de génie mécanique, Université de Sherbrooke, Sherbrooke, Quebec, J1K 2R1, Canada.
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Abstract

The topic of this paper is to present a new Windows™ environment version of the CASINO Monte Carlo program. The goal of this program is to assist scanning electron microscope users in their routine analysis and also in more advanced topic such as electron beam lithography for example. Based on a single scattering algorithm, this software is specially designed for low beam interaction in a bulk and thin foil. This program uses tabulated Mott elastic cross-sections, which benefit of both fast calculation and accurate interaction at low beam energy. At the moment CASINO can either be used to generate X-rays or backscattered electron signals. The program used simple two-dimension geometry to represent real sample. in this version, vertical and horizontal planes can be generated to allow cross-section representation or multi-layers analysis. Then beam can be scanned across different regions to produce X-ray linescan or bascattered electron profiles.

Many new convenient features have been added to the version 2.0 of CASINO. The new interface lets the users to consult the results as the simulation is still in progress.

Type
Quantitative X-Ray Microanalysis in the Microprobe, in the SEM and in The ESEM:Theory and Practice (Organized by R. Gauvin and E. Lifshin)
Information
Microscopy and Microanalysis , Volume 7 , Issue S2: Proceedings: Microscopy & Microanalysis 2001, Microscopy Society of America 59th Annual Meeting, Microbeam Analysis Society 35th Annual Meeting, Long Beach, California August 5-9, 2001 , August 2001 , pp. 684 - 685
Copyright
Copyright © Microscopy Society of America 2001

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References

1.Hovington, P., Drouin, D. et Gauvin, R., “CASINO A New Era of Monte Carlo Code in C Language for the Electron Beam Interaction - Part I: Description of the Program”,Scanning, 19, 1–14,(1997).CrossRefGoogle Scholar
2.Drouin, D., Hovington, P. et Gauvin, R., “CASINO : A New Era of Monte Carlo Code in C Language for the Electron Beam Interaction - Part ILTabulated Values of Mott Cross Section”, Scanning, 19, 20–28, (1997)CrossRefGoogle Scholar
3.Hovington, P., Drouin, D., Gauvin, R., Joy, D. C. et Evans, N., “CASINO : A New Era of Monte Carlo Code in C Language for the Electron Beam Interaction - Part HLStopping Power at Low Energy”, Scanning, 19, 29–35, (1997)CrossRefGoogle Scholar