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Bonding in Ion-Implanted Diamond-Like Carbon Films Characterized by TEM Spectrum Lines and Energy-Filtered Imaging

Published online by Cambridge University Press:  02 July 2020

J. Bentley ,
K.C. Walter  and
N.D. Evans
J. Bentley
Affiliation:
Metals and Ceramics Division, Oak Ridge National Laboratory, PO Box 2008, Oak Ridge, TN37831-6376
K.C. Walter
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM; now at Southwest Research Institute, San Antonio, TX
N.D. Evans
Affiliation:
Metals and Ceramics Division, Oak Ridge National Laboratory, PO Box 2008, Oak Ridge, TN37831-6376 Oak Ridge Institute for Science and Education, PO Box 117, Oak Ridge, TN37830
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Extract

Many of the electrical, mechanical, and electrochemical properties of diamond-like carbon (DLC) coatings are determined by the amount of sp3 bonding. Correlations of bonding and properties are important in efforts to optimize coatings for specific applications. DLC thin films were grown at LANL by plasma deposition and subsequently ion implanted with N or Ar. Cross-sectioned TEM specimens were characterized with a Gatan imaging filter (GIF) interfaced to a LaB6 Philips CM30T at the ORNL SHaRE User Facility. For elemental distribution maps the following conditions were used: incident beam divergence α = 2.9 mrad, collection angle β = 4.8 mrad, slit width ΔE = 30 eV, exposure times of typically 5 s, 2x-binned 512×512 images, and TEM magnification ∼2000. The standard 3-window method was used for producing elemental maps with AE-r background extrapolation; 2-window jump-ratio images were also produced.

Type
Electron Energy-Loss Spectroscopy (EELS) and Imaging
Information
Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 154 - 155
Copyright
Copyright © Microscopy Society of America

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References

1. Bentley, J. and Anderson, I.M., Microscopy and Microanalysis 1996, San Francisco: San Francisco Press (1996) 532.Google Scholar

2. Bruley, J. et al., J. Microscopy 180 (1995) 22.CrossRefGoogle Scholar

3. Research at the Oak Ridge National Laboratory SHaRE User Facility sponsored by the Division of Materials Sciences and Engineering, U.S. Department of Energy, under contract DE-AC05-96OR22464 with Lockheed Martin Energy Research Corp., and through the SHaRE Program under contract DE-AC05-76OR00033 with Oak Ridge Associated Universities.Google Scholar