Hostname: page-component-848d4c4894-jbqgn Total loading time: 0 Render date: 2024-06-22T20:52:02.880Z Has data issue: false hasContentIssue false
  • English
  • Français

Automatic End-point Detection for Ar+ Milling of FIB in situ and ex situ Lift-out Specimens from Semiconductor Devices

Published online by Cambridge University Press:  01 August 2018

C.S. Bonifacio ,
L.A. Giannuzzi ,
P. Nowakowski ,
J.T. Harbaugh ,
M. Campin ,
M. Boccabella ,
M. Ray  and
P.E. Fischione
C.S. Bonifacio
Affiliation:
E.A. Fischione Instruments Inc., Export, PA, USA
L.A. Giannuzzi
Affiliation:
EXpressLO LLC, Lehigh Acres, FL, USA
P. Nowakowski
Affiliation:
E.A. Fischione Instruments Inc., Export, PA, USA
J.T. Harbaugh
Affiliation:
E.A. Fischione Instruments Inc., Export, PA, USA
M. Campin
Affiliation:
E.A. Fischione Instruments Inc., Export, PA, USA
M. Boccabella
Affiliation:
E.A. Fischione Instruments Inc., Export, PA, USA
M. Ray
Affiliation:
E.A. Fischione Instruments Inc., Export, PA, USA
P.E. Fischione
Affiliation:
E.A. Fischione Instruments Inc., Export, PA, USA

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 854 - 855
Copyright
© Microscopy Society of America 2018 

References

[1] Giannuzzi, LA Stevie, FA Micron 30 1999) p. 197.Google Scholar
[2] Giannuzzi, LA in Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice. ed. LA Giannuzzi and FA Stevie Springer New York City p. 201.Google Scholar
[3] Nowakowski, P, et al., Microscopy and Microanalysis 23 2017) p. 300.Google Scholar
[4] Bonifacio, CS, et al., Microscopy and Microanalysis 23 2017) p. 268.Google Scholar
[5] The authors thank Kevin McIlwrath of JEOL USA for STEM image acquisition.Google Scholar