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Application of X-ray Optics to Energy-Dispersive Spectroscopy

Published online by Cambridge University Press:  28 July 2005

Jon J. McCarthy  and
David J. McMillan
Jon J. McCarthy
Affiliation:
Research and Development Department, NORAN Instruments Inc., 2551 West Beltline Highway, Middleton, WI 53562
David J. McMillan
Affiliation:
Research and Development Department, NORAN Instruments Inc., 2551 West Beltline Highway, Middleton, WI 53562
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Abstract

X-ray optics have been used in X-ray analytical instruments for several years. Applications of X-ray optics have been reported in X-ray diffraction, X-ray fluorescence, and wavelength dispersive spectroscopy. X-ray optics have been used to increase the X-ray flux incident on the sample or to direct and focus emitted X-rays from a sample. We report here the use of a grazing incidence optic (GIO) as a flux-enhancing collimator for use with an energy-dispersive (ED) detector used to perform electron beam microanalysis. We found that the GIO in combination with an ED spectrometer (EDS) provides substantial intensity gain for X-ray lines with energy below 1 keV. The GIO is also found to provide a modest focus effect, and introduces minimal spectral artifacts.

Keywords

microanalysisEDSSEMgrazing incidence opticX-ray intensity gain
Type
1998 TOPICAL SYMPOSIUM OF THE MICROBEAM ANALYSIS SOCIETY
Information
Microscopy and Microanalysis , Volume 4 , Issue 6 , December 1998 , pp. 632 - 641
Copyright
© 2005 Microscopy Society of America

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