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Application of Low Energy Broad Ion Beam Milling to Improve the Quality of FIB Prepared TEM Samples

Published online by Cambridge University Press:  09 October 2013

A. Pakzad ,
S. Mick ,
C. Vartuli ,
J. Chung  and
G. Lian
A. Pakzad
Affiliation:
S. Mick
Affiliation:
C. Vartuli
Affiliation:
J. Chung
Affiliation:
G. Lian
Affiliation:

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 19 , Issue S2: Proceedings of Microscopy & Microanalysis 2013 , August 2013 , pp. 1326 - 1327
Copyright
Copyright © Microscopy Society of America 2013