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An Introduction to Helium Ion Microscopy

Published online by Cambridge University Press:  31 July 2006

J Notte
Affiliation:
ALIS Corporation
R Hill
Affiliation:
ALIS Corporation
S McVey
Affiliation:
ALIS Corporation
L Farkas
Affiliation:
ALIS Corporation
R Percival
Affiliation:
ALIS Corporation
B Ward
Affiliation:
ALIS Corporation
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2005

Type
Research Article
Copyright
© 2006 Microscopy Society of America

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