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AFM Integrated with SEM/FIB for Complete 3D Metrology Measurements

Published online by Cambridge University Press:  27 August 2014

Aaron Lewis ,
A. Komissar ,
A. Ignatov ,
Oleg Fedoroyov ,
E. Maayan  and
Dalia Yablon
Aaron Lewis
Affiliation:
The Department of Applied Physics, The Hebrew University of Jerusalem, Israel
A. Komissar
Affiliation:
Nanonics Imaging Ltd, 19 Hartum St., BYNET Bldg, Jerusalem, Israel
A. Ignatov
Affiliation:
Nanonics Imaging Ltd, 19 Hartum St., BYNET Bldg, Jerusalem, Israel
Oleg Fedoroyov
Affiliation:
Nanonics Imaging Ltd, 19 Hartum St., BYNET Bldg, Jerusalem, Israel
E. Maayan
Affiliation:
Nanonics Imaging Ltd, 19 Hartum St., BYNET Bldg, Jerusalem, Israel
Dalia Yablon
Affiliation:
SurfaceChar LLC., Sharon MA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 1112 - 1113
Copyright
Copyright © Microscopy Society of America 2014