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Accelerating Voltage and Probe Current Dependence of Electron Beam Drilling Rates for Silicon Crystal

Published online by Cambridge University Press:  04 August 2017

Noriaki Endo
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, Japan.
Yukihito Kondo
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, Japan.
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© Microscopy Society of America 2017 

References

[1] Egerton, RF, Li, P & Malac, M Micron 35 2004). p. 399.CrossRefGoogle Scholar
[2] Thomas, LE Ultramicroscopy 18 1985). p. 173.CrossRefGoogle Scholar
[3] Crozier, PA, McCartney, MR & Smith, DJ Sur. Sci 237 1990). p. 232.CrossRefGoogle Scholar
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