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Accelerating Voltage and Probe Current Dependence of Electron Beam Drilling Rates for Silicon Crystal

Published online by Cambridge University Press:  04 August 2017

Noriaki Endo  and
Yukihito Kondo
Noriaki Endo
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, Japan.
Yukihito Kondo
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, Japan.

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 1828 - 1829
Copyright
© Microscopy Society of America 2017 

References

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[3] Crozier, PA, McCartney, MR & Smith, DJ Sur. Sci 237 1990). p. 232.CrossRefGoogle Scholar