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Progress Towards Arrays of Microcalorimeter X-Ray Detectors

Published online by Cambridge University Press:  02 July 2020

S.W. Nam ,
D.A. Wollman ,
Dale E. Newbury ,
G.C. Hilton ,
K.D. Irwin ,
D.A. Rudman ,
S.Deiker ,
N.F. Bergren  and
John M. Martinis
S.W. Nam
Affiliation:
National Institute of Standards and Technology, Boulder, CO, 80305
D.A. Wollman
Affiliation:
National Institute of Standards and Technology, Boulder, CO, 80305
Dale E. Newbury
Affiliation:
National Institute of Standards and Technology, and, Gaithersburg, MD, 20899
G.C. Hilton
Affiliation:
National Institute of Standards and Technology, Boulder, CO, 80305
K.D. Irwin
Affiliation:
National Institute of Standards and Technology, Boulder, CO, 80305
D.A. Rudman
Affiliation:
National Institute of Standards and Technology, Boulder, CO, 80305
S.Deiker
Affiliation:
National Institute of Standards and Technology, Boulder, CO, 80305
N.F. Bergren
Affiliation:
National Institute of Standards and Technology, Boulder, CO, 80305
John M. Martinis
Affiliation:
National Institute of Standards and Technology, Boulder, CO, 80305
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Abstract

The high performance of single-pixel microcalorimeter EDS (μ,cal EDS) has been shown to be very useful for a variety of microanalysis cases. The primary advantage of jxcal EDS over conventional EDS is the factor of 25 improvement in energy resolution (∽3 eV in real-time). This level of energy resolution is particularly important for applications such as nanoscale contaminant analysis where it is necessary to resolve peak overlaps at low x-ray energies. Because μcal EDS offers practical solutions to many microanalysis problems, several companies are proceeding with commercialization of single-pixel μal EDS technology. Two drawbacks limiting the application of uxal EDS are its low count rate (∽500 s−1) and small area (∽0.04 mm for a bare single pixel, ∽5 mm2 with a polycapillary optic). We are developing a 32x32 pixel array with a total area of 40 mm2 and with a total count rate between 105 s−1 and 106 s−1.

Type
Frontiers of X-Ray Spectrometry (Eds and Wds) in Microanalysis (Organized by D. Newbury and J. H. Scott)
Information
Microscopy and Microanalysis , Volume 7 , Issue S2: Proceedings: Microscopy & Microanalysis 2001, Microscopy Society of America 59th Annual Meeting, Microbeam Analysis Society 35th Annual Meeting, Long Beach, California August 5-9, 2001 , August 2001 , pp. 1050 - 1051
Copyright
Copyright © Microscopy Society of America 2001

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References

references

1.Wollman, D.A.et al., J.|Microscopy 188 (1997) 196.CrossRefGoogle Scholar
2.Nam, S.W.et al., Microsc. Microanal. 6 (Suppl. 2: Proceedings) (2000) 742.CrossRefGoogle Scholar
3. Contribution of the U.S. Government; not subject to copyright.Google Scholar