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High Resolution X-Ray Microanalysis of Nb/Al Multilayer Thin Films

Published online by Cambridge University Press:  02 July 2020

G. Lucadamo ,
M. Watanabe ,
K. Barmak  and
D. B. Williams
G. Lucadamo
Affiliation:
Department of Materials Science and Engineering, Lehigh University, Bethlehem, PA18015, USA
M. Watanabe
Affiliation:
Department of Materials Science and Engineering, Lehigh University, Bethlehem, PA18015, USA
K. Barmak
Affiliation:
Department of Materials Science and Engineering, Lehigh University, Bethlehem, PA18015, USA
D. B. Williams
Affiliation:
Department of Materials Science and Engineering, Lehigh University, Bethlehem, PA18015, USA
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Extract

A study of reactive phase formation in thin films requires the understanding of the thermodynamics and kinetics of the reactions. Previous investigations of phase formation in Nb/Al multilayers using calorimetry and x-ray diffraction have observed that despite the presence of rather large driving forces for phase formation, a pronounced nucleation event occurs. This behavior has been reported in other systems including Ti/Al and Ni/Al. The initial nature of the interface can affect the nucleation, therefore careful studies of the structure and composition of the initial interfacial region may explain the reason for a kinetically separated nucleation and lateral growth step preceding normal phase growth. In addition, examination of the interface may also lend insight into the effects of different deposition processes and can provide evidence for the formation of solid solutions or compounds that can lower driving forces available for phase formation. Finally, the cross-sectional multilayer sample provides a means of characterizing spatial resolution and isolating specimen preparation artifacts.

Type
Analytical Electron Microscopy
Information
Microscopy and Microanalysis , Volume 3 , Issue S2: Proceedings: Microscopy & Microanalysis '97, Microscopy Society of America 55th Annual Meeting, Microbeam Analysis Society 31st Annual Meeting, Histochemical Society 48th Annual Meeting, Cleveland, Ohio, August 10-14, 1997 , August 1997 , pp. 967 - 968
Copyright
Copyright © Microscopy Society of America 1997

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References

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5.Lucadamo, G. and Barmak, K.acknowledge NSF DMR-9308651 for financial support. The authors also thank Dr. K.R. Coffey for film deposition and Dr. Reza Alani at Gatan Inc. for sample preparation.Google Scholar