Skip to main content Accessibility help
×
Home

Chemical Quantification of Atomic-Scale EDS Maps under Thin Specimen Conditions

Published online by Cambridge University Press:  13 October 2014

Ping Lu
Affiliation:
Sandia National Laboratories, PO Box 5800, MS 1411, Albuquerque, NM 87185-1411, USA
Eric Romero
Affiliation:
Sandia National Laboratories, PO Box 5800, MS 1411, Albuquerque, NM 87185-1411, USA
Shinbuhm Lee
Affiliation:
Department of Materials Science and Metallurgy, University of Cambridge, Cambridge, UK
Judith L. MacManus-Driscoll
Affiliation:
Department of Materials Science and Metallurgy, University of Cambridge, Cambridge, UK
Quanxi Jia
Affiliation:
Los Alamos National Laboratory, Center for Integrated Nanotechnologies, Los Alamos, NM 87545, USA
Corresponding
E-mail address:

Abstract

We report our effort to quantify atomic-scale chemical maps obtained by collecting energy-dispersive X-ray spectra (EDS) using scanning transmission electron microscopy (STEM) (STEM-EDS). With thin specimen conditions and localized EDS scattering potential, the X-ray counts from atomic columns can be properly counted by fitting Gaussian peaks at the atomic columns, and can then be used for site-by-site chemical quantification. The effects of specimen thickness and X-ray energy on the Gaussian peak width are investigated using SrTiO3 (STO) as a model specimen. The relationship between the peak width and spatial resolution of an EDS map is also studied. Furthermore, the method developed by this work is applied to study cation occupancy in a Sm-doped STO thin film and antiphase boundaries (APBs) present within the STO film. We find that Sm atoms occupy both Sr and Ti sites but preferably the Sr sites, and Sm atoms are relatively depleted at the APBs likely owing to the effect of strain.

Type
Materials Applications
Copyright
© Microscopy Society of America 2014 

Access options

Get access to the full version of this content by using one of the access options below.

References

Allen, L.J., D’Alfonso, A.J., Freitag, B. & Klenov, D.O. (2012). Chemcial mapping at atomic resolution using energy-dispersive x-ray spectroscopy. MRS Bulletin 37, 4752.CrossRefGoogle Scholar
Bosman, M., Keast, Y.J., Garcia-Munoz, J.L., D’Afonso, A.J., Findlay, S.D. & Allen, L.J. (2007). Two-dimensional mapping of chemical information at atomic resolution. Phys Rev Lett 99, 086102.CrossRefGoogle ScholarPubMed
Browning, N.D., Chisholm, M.F. & Pennycook, S.J. (1993). Atomic-resolution chemical analysis using a scanning transmission electron microscope. Nature 366, 143146.CrossRefGoogle Scholar
Chu, M.W., Liou, S.C., Chang, C.P., Choa, F.S. & Chen, C.H. (2010). Emergent chemical mapping at atomic-column resolution by energy-dispersive x-ray spectroscopy in an aberration-corrected electron microscope. Phys Rev Lett 104, 196101.CrossRefGoogle Scholar
Cliff, G. & Lorimer, G.W. (1975). The quantitative analysis of thin specimen. J Microsc 103, 203207.CrossRefGoogle Scholar
D’Alfonso, A.J., Freitag, B., Klenov, V. & Allen, L.J. (2010). Atomic-resolution chemical mapping using energy-dispersive x-ray spectroscopy. Phys Rev B 81, 100101.CrossRefGoogle Scholar
Forbes, B.D., D’Alfonso, A.J., Williams, R.E.A., Srinivasan, R., Fraser, H.L., McComb, D.W., Freitag, B., Klenov, D.O. & Allen, L.J. (2012). Contribution of thermally scattered electrons to atomic resolution elemental maps. Phys Rev B86, 24108.CrossRefGoogle Scholar
Kimoto, K., Asaka, T., Nagai, T., Saito, M., Matsui, Y. & Ishizuka, K. (2007). Element-selective imaging of atomic columns in a crystal using STEM and EELS. Nature 450, 702704.CrossRefGoogle Scholar
Klenov, D.O. & Zide, J.M.O. (2011). Structure of the InAlAs/InP interface by atomically resolved energy dispersive spectroscopy. App Phys Lett 99, 141904.CrossRefGoogle Scholar
Kothleitner, G., Neish, M.J., Lugg, N.R., Finflay, S.D., Grogger, W., Hofer, F. & Allen, L.J. (2014). Quantitative elemental mapping at atomic resolution using X-ray spectroscopy. Phy Rev Lett 112, 085501.CrossRefGoogle Scholar
Kotula, P., Klenov, D.O. & Von Harrach, H.S. (2012). Challenges to quantitative multivariate statistical analysis of atomic-resolution X-ray spectral images. Microsc Microanal 18, 691698.CrossRefGoogle Scholar
Lu, P., Xiong, J., Van Benthem, M. & Jia, Q.X. (2013). Atomic-scale chemical quantification of oxide interfaces using energy-dispersive X-ray spectroscopy. App Phys Lett 102, 173111.CrossRefGoogle Scholar
Lu, P., Zhou, L., Kramer, M.J. & Smith, D.J. (2014). Atomic-scale chemical imaging and quantification of metallic alloy structures by energy-dispersive X-ray spectroscopy. Sci Rep 4, 39453949.CrossRefGoogle ScholarPubMed
Muller, D.A., Fitting Kourkoutis, L., Murfitt, M., Song, J.H., Hwang, H.Y., Silcox, J., Dellby, N. & Krivanek, O.L. (2008). Atomic-scale chemical imaging of composition and bonding by aberration-corrected microscopy. Science 319, 10731076.CrossRefGoogle ScholarPubMed
Oxley, M.P., Varela, M., Pennycook, T.J., Van Benthem, K., Findlay, S.D., D’Alfonso, A.J., Allen, L.J. & Pennycook, S.J. (2007). Interpreting atomic-resolution spectroscopic images. Phys Rev B76, 6430364311.CrossRefGoogle Scholar
Rose, A. (1948). In Advances in Electronics, Marton A. (Ed.), pp. 131. New York: Academic Press.Google Scholar
Shah, A.B., Ramasse, Q.M., Zhai, X.F., Wen, J.G., May, S.J., Petrov, I., Bhattacharya, A., Abbamonte, P., Eckstein, J.N. & Zuo, J.M. (2012). Probing interfacial electronic structures in atomic layer LaMnO3 and SrTiO3 superlattices. Adv Mater 22, 11561160.CrossRefGoogle Scholar
Von Harrach, H.S., Dona, P., Freitag, B., Soltau, H., Niculae, A. & Rohde, M. (2009). An integrated silicon drift detector system for FEI Schottky field emission transmission electron microscopes. Microsc Microanal 15(Suppl 2), 208209.CrossRefGoogle Scholar
Wang, P., D’Alfonso, A.J., Findlay, S.D., Allen, L.J. & Bleloch, A.L. (2008). Contrast reversal in atomic-resolution chemical mapping. Phys Rev Lett 101, 236102.CrossRefGoogle ScholarPubMed
Watanabe, M., Kanno, M. & Okunishi, E. (2010). Atomic-resolution elemental mapping by EELS and XEDS in aberration corrected STEM. JEOL News 45, 815.Google Scholar
Williams, B. & Carter, C.B. (2009). Transmission electron microscopy: A textbook for materials science, 2nd ed. New York: Springer.CrossRefGoogle Scholar

Full text views

Full text views reflects PDF downloads, PDFs sent to Google Drive, Dropbox and Kindle and HTML full text views.

Total number of HTML views: 44
Total number of PDF views: 255 *
View data table for this chart

* Views captured on Cambridge Core between September 2016 - 22nd January 2021. This data will be updated every 24 hours.

Hostname: page-component-76cb886bbf-wsww6 Total loading time: 0.296 Render date: 2021-01-22T17:11:28.657Z Query parameters: { "hasAccess": "0", "openAccess": "0", "isLogged": "0", "lang": "en" } Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": false, "newCiteModal": false }

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Chemical Quantification of Atomic-Scale EDS Maps under Thin Specimen Conditions
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Chemical Quantification of Atomic-Scale EDS Maps under Thin Specimen Conditions
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Chemical Quantification of Atomic-Scale EDS Maps under Thin Specimen Conditions
Available formats
×
×

Reply to: Submit a response


Your details


Conflicting interests

Do you have any conflicting interests? *