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Calibration and Test Structures for Nanometrology

Published online by Cambridge University Press:  31 July 2006

J Kim ,
S Deo ,
K Jalhadi ,
S-Y Lee  and
D Joy
J Kim
Affiliation:
University of Tennessee
S Deo
Affiliation:
University of Tennessee
K Jalhadi
Affiliation:
University of Tennessee
S-Y Lee
Affiliation:
Auburn University
D Joy
Affiliation:
University of Tennessee,Oak Ridge National Laboratory
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Type
Research Article
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 78 - 79
Copyright
© 2006 Microscopy Society of America

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