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Aberration Measurement and Correction in Scanning Transmission Electron Microscopy using Machine Learning

Published online by Cambridge University Press:  30 July 2021

Ryusuke Sagawa ,
Fuminori Uematsu ,
Keito Aibara ,
Tomohiro Nakamichi  and
Shigeyuki Morishita
Ryusuke Sagawa
Affiliation:
JEOL Ltd., Tokyo, Japan
Fuminori Uematsu
Affiliation:
JEOL Ltd., Tokyo, Japan
Keito Aibara
Affiliation:
JEOL Ltd., Tokyo, Japan
Tomohiro Nakamichi
Affiliation:
JEOL Ltd., Tokyo, Japan
Shigeyuki Morishita
Affiliation:
JEOL Ltd., Akishima, Tokyo, Japan

Abstract

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Type
Full System and Workflow Automation for Enabling Big Data and Machine Learning in Electron Microscopy
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 814 - 816
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Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Morishita, S et al. , Microscopy, 67 (2018) p. 46.CrossRefGoogle Scholar
Sawada, H et al. , Ultramicroscopy, 108 (2008) p. 1467.CrossRefGoogle Scholar