3-D Electron Microscopy for Nano-Technology and the IC Industry

C. Kübel; D. Hubert; W.F. Voorhout; M.T. Otten

doi:10.1017/S143192760210359X

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3-D Electron Microscopy for Nano-Technology and the IC Industry

Published online by Cambridge University Press: 01 November 2002

C. Kübel ,

D. Hubert ,

W.F. Voorhout and

M.T. Otten

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C. Kübel: Affiliation:
FEI Company, Application Laboratory, P.O. Box 80066, 5600 KA Eindhoven, The Netherlands

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Type: Abstract
Information: Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 1104 - 1105

DOI: https://doi.org/10.1017/S143192760210359X [Opens in a new window]
Copyright: Copyright © Microscopy Society of America 2002

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3-D Electron Microscopy for Nano-Technology and the IC Industry

Volume 8, Issue S02
C. Kübel ^(a1), D. Hubert, W.F. Voorhout and M.T. Otten
DOI: https://doi.org/10.1017/S143192760210359X

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3-D Electron Microscopy for Nano-Technology and the IC Industry

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