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1970-2014: From Space Ion Thrusters to Nano-Tools

Published online by Cambridge University Press:  27 August 2014

Pierre Sudraud
Pierre Sudraud*
Affiliation:
Orsay-Physics, Tescan Orsay Holding, Fuveau, France

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 304 - 305
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Crewe, AV, Wall, J, Langmore, J Science 168 (1970), p. 1338.Google Scholar
[2] Orloff, JH, Swanson, LW J. Vac. Sci. Technol. 12 (1975), p. 1209.Google Scholar
[3] Escovitz, WH, Fox, TR, Levi-Setti, R Proceedings of the National Academy of Sciences of the United States of America (1975), p. 1826.Google Scholar
[4] Krohn, VE, Ringo, GR Appl. Phys. Lett. 27 (1975), p. 479.Google Scholar
[5] Mahoney, JF, et al, J. Appl. Phys. 40 (1969), p. 5101.Google Scholar
[6] , P These d’Etat Université Paris XI Orsay (1979.Google Scholar
[7] Orloff, J, Utlaut, M, Swanson, L in “High resolution Focused Ion Beams: FIB and Its Applications”, Kluwer Academic / Plenum Publishers, New York.Google Scholar
[8] I thank all my colleagues from Orsay-Physics, and especially Dr. A. Delobbe and Dr. M. Talec for permanent scientific discussions and help.Google Scholar