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High-precision small-scale laser focal spot measurements

  • Z.W. Lu (a1), X.Y. Liu (a1), X. Wang (a1), D.X. Ba (a1), Z.H. Jiang (a2), P.Y. Du (a1) and C.Y. Zhu (a1)...


In this paper, a method of two-dimensional fine-scanning with charge coupled device has been conducted to precisely measure spatial position and intensity distribution of small-scale focal spot (diameter in microns). The measurement accuracy of the small-scale focal spot position is better than 1 µm when the fluctuations of the light energy and background noise are relatively small. The theoretical analysis is consistent with the experimental results.


Corresponding author

Address correspondence and reprint requests to: Z.W. Lu, National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, P. O. Box 3031, Harbin 150080, China. E-mail:


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