Skip to main content Accessibility help
×
Home

Studies on Surface Tension Influenced Critical Gap in Cantilever Microstructures

  • L.-J. Yang (a1) and S. Marimuthu (a1)

Abstract

This note presents an elasto-capillary model of a cantilever subject to capillary stiction during drying process of removing sacrificial layers in MEMS. Similar to the dynamic analysis of the electrostatic pull-in of electrostatic micro actuators, the cantilever beam tends to be pulled down to the substrate due to the nonlinear capillary force with respect to the gap. The critical one-half gap deformation and the corresponding critical wetting area for pulling down a micro cantilever by surface tension are analytically found herein. The instability situation of a generalized critical deformation for power-law surface force with respect to gap is also predicted accordingly. Some prior MEMS works are exemplified to justify this critical one-half gap deformation for capillary stiction.

Copyright

Corresponding author

*Corresponding author (Ljyang@mail.tku.edu.tw)

References

Hide All
1.de Genes, P.G., “Wetting: Statics and Dynamics,” Reviews of Modern Physics, 57, pp. 827890 (1985).
2.Israelachvili, J.N., Intermolecular and Surface Forces, Academic Press, UK, p. 120 (1985).
3.Madou, M., Fundamentals of Microfabrication, 1st Edition, CRC Press, New York, USA, p. 433 (1997).
4.Mastrangelo, C.H. and Hsu, C.H.A Simple Experimental Technique for the Measurement of the Work of Adhesion of Microstructures,” Proceedings of IEEE Solid-State Sensors and Actuators Workshop, Hilton Head Island, SC, USA, pp. 208212 (1992).
5.Mastrangelo, C.H. and Hsu, C.H., “Mechanical Stability and Adhesion of Microstructures under Capillary Forces — Part I: Basic Theory,” Journal of Microelectromechanical Systems, 2, pp. 3343 (1993).
6.Mastrangelo, C.H. and Hsu, C.H., “Mechanical Stability and Adhesion of Microstructures under Capillary Forces – Part II: Experiments,” Journal of Microelectromechanical Systems, 2, pp.4455 (1993).
7.Tas, N., Sonnenberg, T., Jansen, H., Legtenberg, R. and Elwenspoek, M., “Stiction in Surface Microm-achining,” Journal of Micromechanics and Microengineering, 6, pp. 385397 (1996).
8.Zhao, Y.P., Wang, L.S. and Yu, T.X., “Mechanics of Adhesion in MEMS – A Review,” Journal of Adhesion Science and Technology, 17, pp. 519546 (2003).
9.Wei, Z. and Zhao, Y.P., “Growth of Liquid Bridge in AFM,” Journal of Physics D: Applied Physics, 40, pp. 43684375 (2007).
10.Yang, L.J., Yao, T.J. and Tai, Y.C., “The Marching Velocity of the Capillary Meniscus in a Microchannel,” Journal of Micromechanics and Microengineering, 14, pp. 220225 (2004).
11.Yang, L.J., Liu, K.C. and Lin, W.C., “On Deriving Surface Tension Forces in MEMS,” Journal of Applied Science and Engineering, 17, pp. 223230 (2014).
12.Yang, L.J. and Liu, K.C., “Surface Tension-Driven Micro Valves with Large Rotating Stroke,” Tamkang Journal of Science and Engineering, 10, pp. 141146 (2007).
13.Loke, Y., McKinnon, G.H. and Brette, M.J., “Fabrication and Characterization of Silicon Micro-machined Threshold Accelerometers,” Sensors and Actuators A: Physical, 29, pp. 235240 (1991).
14.Degani, O., “Pull-in Study of an Electrostatic Torsion Mirror,” Journal of Microelectromechanical Systems, 7, pp. 373379 (1998).
15.Wang, H.J., “Capillary of Rectangular Micro Grooves and Their Applications to Heat Pipes,” Tamkang Journal of Science and Engineering, 8, pp. 249255 (2005).
16.Gere, G.M. and Timoshenko, S.P., Mechanics of Materials, 2nd Edition, Wadsworth Publishing Co. Inc., Belmont, CA, USA, pp. 736737 (1984).
17.Yang, L.J., Jan, D.L. and Lin, W.C., “Steel-Based Bionic Actuators for Flapping Micro-air-vehicles,” Micro and Nano Letters, 8, pp. 686690 (2013).
18.Bico, J., Roman, B., Moulin, L. and Boudaoud, A., “Elastocapillary Coalescence in Wet Hair,” Nature, 432, p. 690 (2004).
19.Yao, T.J., Yang, X. and Tai, Y.C., “BrF3 Dry Release Technology for Large Freestanding Parylene Microstructures and Electrostatic Actuators,” Sensors and Actuators A: Physical, 97–98, pp. 771775 (2002).
20.van Spengen, W.M., Puers, R. and De Wolf, I., “The Prediction of Stiction Failure in MEMS,” IEEE Transactions on Device and Materials Reliability, 3, pp. 167172 (2003).
21.Wang, Z., Wang, F.C. and Zhao, Y.P., “Tap Dance of a Water Droplet,” Proceedings of the Royal Society A, 468, pp. 24852495 (2012).

Keywords

Related content

Powered by UNSILO

Studies on Surface Tension Influenced Critical Gap in Cantilever Microstructures

  • L.-J. Yang (a1) and S. Marimuthu (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed.