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Thermodynamic study and preparation of Si–B–N ceramic coating by LPCVD from SiCl4–NH3–BCl3–H2–Ar system

Published online by Cambridge University Press:  15 August 2017

Jianping Li ,
Laifei Cheng ,
Fang Ye ,
Yongsheng Liu ,
Yan Zhu  and
Litong Zhang
Jianping Li
Affiliation:
Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi’an, Shaanxi 710072, China
Laifei Cheng*
Affiliation:
Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi’an, Shaanxi 710072, China
Fang Ye
Affiliation:
Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi’an, Shaanxi 710072, China
Yongsheng Liu
Affiliation:
Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi’an, Shaanxi 710072, China
Yan Zhu
Affiliation:
Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi’an, Shaanxi 710072, China
Litong Zhang
Affiliation:
Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi’an, Shaanxi 710072, China
*
a) Address all correspondence to this author. e-mail: chenglf@nwpu.edu.cn
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Abstract

The codeposition characteristics of Si–B–N ceramics from the SiCl4–NH3–BCl3–H2–Ar system at lower temperatures and phase transformation of as-prepared Si–B–N ceramics at temperatures from 1200 to 1800 °C were investigated. Thermodynamic analysis results indicated that the BN + Si3N4 dual phase region existed from 800 to 1200 °C and that 800 °C was an optimum deposition temperature to deposit Si–B–N ceramic coating. Deposition efficiencies at equilibrium for Si3N4 and BN were high, particularly at temperatures below 1000 °C. Pressure and dilution ratio of H2 had little influence on deposition efficiencies of BN and Si3N4 at 800 °C. The amorphous Si–B–N ceramic coatings were successfully deposited at 800 °C from the same precursor system and contained N–B and N–Si bonds by XPS analysis. It kept amorphous below 1600 °C in N2 and partly transformed to α/β-Si3N4 when heat treated at 1600 °C in N2 for 2 h. These results demonstrated that the composite Si–B–N ceramics could be fabricated at 800 °C and used below 1600 °C.

Keywords

ceramicchemical vapor depositionphase transformation
Type
Articles
Information
Journal of Materials Research , Volume 32 , Issue 20 , 27 October 2017 , pp. 3801 - 3810
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Copyright
Copyright © Materials Research Society 2017 

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Footnotes

Contributing Editor: Yanchun Zhou

References

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