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Synthesis of large scale MoS2 for electronics and energy applications

Published online by Cambridge University Press:  11 April 2016

Nitin Choudhary ,
Mumukshu D. Patel ,
Juhong Park ,
Ben Sirota  and
Wonbong Choi
Nitin Choudhary
Affiliation:
Department of Materials Science and Engineering, University of North Texas, Denton, Texas 76207, USA
Mumukshu D. Patel
Affiliation:
Department of Materials Science and Engineering, University of North Texas, Denton, Texas 76207, USA
Juhong Park
Affiliation:
Department of Materials Science and Engineering, University of North Texas, Denton, Texas 76207, USA
Ben Sirota
Affiliation:
Department of Materials Science and Engineering, University of North Texas, Denton, Texas 76207, USA
Wonbong Choi*
Affiliation:
Department of Materials Science and Engineering and Department of Mechanical and Energy Engineering, University of North Texas, Denton, Texas 76207, USA
*
a)Address all correspondence to this author. e-mail: Wonbong.choi@unt.edu
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Abstract

Layered molybdenum disulfide (MoS2) has attracted great attention owing to its unique properties. However, synthesizing large area thin film with high crystal quality and uniformity remains a challenge. The present study explores large scale MoS2 growth methods, i.e., two-step method of sputtering-chemical vapor deposition and direct sputtering method, and applies them to fabricate field effect transistors and supercapacitors, respectively. The thickness modulated MoS2 films by two-step method exhibited high field effect mobility [∼12.24 cm2/(V s)] and current on/off ratio (∼106). The direct sputtering of MoS2 demonstrated excellent electrochemical performance with a high capacitance (∼30 mF/cm2) and cyclic stability upto 5000 cycles. Our growth methods reported here for the large scale MoS2 with high uniformity can trigger the development of several important technologies in two-dimensional materials.

Keywords

chemical vapor deposition (CVD)sputteringelectrical properties
Type
Invited Reviews
Information
Journal of Materials Research , Volume 31 , Issue 7: Focus Issue: Two-Dimensional Heterostructure Materials , 14 April 2016 , pp. 824 - 831
Copyright
Copyright © Materials Research Society 2016 

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References

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