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Surface textured zinc oxide films

Published online by Cambridge University Press:  31 January 2011

P. M. Verghese  and
D. R. Clarke
P. M. Verghese
Affiliation:
Materials Department, College of Engineering, University of California, Santa Barbara, California 93106-5050
D. R. Clarke
Affiliation:
Materials Department, College of Engineering, University of California, Santa Barbara, California 93106-5050
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Abstract

Both epitaxial and crystallographically fiber-textured ZnO films can exhibit a surface texturing (“cratered”) morphology when grown by pulsed laser deposition at temperatures in the range of 350–750 °C in a background pressure of oxygen. The surface texturing is a consequence of the nucleation of oriented c axis grains that grow geometrically and impinge laterally. It is concluded that the surface texturing is due to nonequilibrium growth, being the result of a competition between the arriving flux, diffusive flux along the surface, and, possibly, concurrent ion etching from the laser-ablated plasma plume. At higher temperatures, no surface texturing occurs, presumably because of concurrent grain growth and more rapid surface smoothing by diffusion.

Type
Articles
Information
Journal of Materials Research , Volume 14 , Issue 3 , March 1999 , pp. 1039 - 1045
Copyright
Copyright © Materials Research Society 1999

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References

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