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Superconducting Ba0.6K0.4BiO3: Thin film preparation by RF magnetron sputtering

Published online by Cambridge University Press:  31 January 2011

C.J. Hou ,
H. Steinfink ,
L. Rabenberg ,
Claude Hilbert  and
Harry Kroger
C.J. Hou
Affiliation:
Center for Materials Science and Engineering, The University of Texas at Austin, Austin, Texas 78712-1062
H. Steinfink
Affiliation:
Center for Materials Science and Engineering, The University of Texas at Austin, Austin, Texas 78712-1062
L. Rabenberg
Affiliation:
Center for Materials Science and Engineering, The University of Texas at Austin, Austin, Texas 78712-1062
Claude Hilbert
Affiliation:
Computer Physics Laboratory, Microelectronics and Computer Technology Corporation, 12100 Technology Boulevard, Austin, Texas 78727
Harry Kroger
Affiliation:
Computer Physics Laboratory, Microelectronics and Computer Technology Corporation, 12100 Technology Boulevard, Austin, Texas 78727
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Abstract

Superconducting Ba0.6K0.4BiO3 thin films with transition temperatures up to 25 K have been successfully grown on SrTiO3 substrates using RF magnetron sputtering and postgrowth oxygen annealing. Systematic variation of the sputtering process parameters showed that optimum films can be grown on substrates heated to 400 °C in a 10 mTorr atmosphere containing 96% Ar and 4% O2 and using a target containing Ba, K, and Bi in ratios of 0.6:1.2:1.4. High transition temperature superconductivity was observed only in highly oriented, crystalline films having the ideal stoichiometry, Ba0.6K0.4BiO3.

Type
Articles
Information
Journal of Materials Research , Volume 8 , Issue 8 , August 1993 , pp. 1798 - 1804
Copyright
Copyright © Materials Research Society 1993

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References

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