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Structure and bonding studies of the C:N thin films produced by rf sputtering method

  • C. J. Torng (a1), J. M. Sivertsen (a1), J. H. Judy (a2) and C. Chang (a3)

Abstract

Thin C:N films were prepared by rf diode sputtering of a graphite target in a mixed argon/nitrogen plasma. We have observed a systematic variation of the properties of these C:N films with an increase in the nitrogen partial pressure. XPS, AES, and TEM studies show that nitrogen will stabilize the diamond sp3 bonding. From XPS studies, we found that the density of our C:N films is increased from 1.37 × 1023 atoms/cm3 to 1.63 × 1023 atoms/cm3 using a 100% nitrogen plasma. The energy gap of our nitrogen carbon also shows an increase from 1.1 eV to 1.4 eV using a 100% nitrogen plasma. The mechanical properties also are shown to be enhanced for certain applications. By using the same method, we can also show that it can produce 100% amorphous C:N films which are more diamond-like as compared with other methods.

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Structure and bonding studies of the C:N thin films produced by rf sputtering method

  • C. J. Torng (a1), J. M. Sivertsen (a1), J. H. Judy (a2) and C. Chang (a3)

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