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Structural analysis of coexisting tetragonal and rhombohedral phases in polycrystalline Pb(Zr0.35Ti0.65)O3 thin films

Published online by Cambridge University Press:  31 January 2011

Maxim B. Kelman ,
Paul C. McIntyre ,
Bryan C. Hendrix ,
Steven M. Bilodeau ,
Jeffrey F. Roeder  and
Sean Brennan
Maxim B. Kelman*
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, California 94305
Paul C. McIntyre*
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, California 94305
Bryan C. Hendrix
Affiliation:
ATMI, Inc., 7 Commerce Drive, Danbury, Connecticut 06810
Steven M. Bilodeau
Affiliation:
ATMI, Inc., 7 Commerce Drive, Danbury, Connecticut 06810
Jeffrey F. Roeder
Affiliation:
ATMI, Inc., 7 Commerce Drive, Danbury, Connecticut 06810
Sean Brennan
Affiliation:
Stanford Synchrotron Radiation Laboratory, Stanford, California 94305
*
a) e-mail: maxkel@stanford.edu
b) e-mail: pcm1@stanford.edu
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Abstract

Structural properties of polycrystalline Pb(Zr0.35Ti0.65)O3 (PZT) thin films grown by metalorganic chemical vapor deposition on Ir bottom electrodes were investigated. Symmetric x-ray diffraction measurements showed that as-deposited 1500 íthick PZT films are partially tetragonal and partially rhombohedral. Cross-section scanning electron microscopy showed that these films have a polycrystalline columnar microstructure with grains extending through the thickness of the film. X-ray depth profiling using the grazing-incidence asymmetric Bragg scattering geometry suggests that each grain has a bilayer structure consisting of a near-surface region in the etragonal phase and the region at the bottom electrode interface in the rhombohedral hase. The required compatibility between the tetragonal and rhombohedral phases in he proposed layered structure of the 1500 Å PZT can explain the peak shifts observed n the symmetric x-ray diffraction results of thicker PZT films.

Type
Articles
Information
Journal of Materials Research , Volume 18 , Issue 1 , January 2003 , pp. 173 - 179
Copyright
Copyright © Materials Research Society 2003

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References

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