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Solid-phase reactions in Ir/(111)Si systems studied by means of x-ray emission spectroscopy

  • E. Z. Kurmaev (a1), V. R. Galakhov (a1), S. N. Shamin (a1), T. Rodríguez (a2), A. Almendra (a2), J. Sanz-Maudes (a2), K. Göransson (a3) and I. Engström (a3)...

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High energy resolved x-ray emission spectroscopy with variable electron beam excitation is applied for study of solid-phase reactions in the Ir/(111)Si system as a function of annealing temperature. The formation of Ir silicides as a function of depth is studied by measurements of Si L2,3 x-ray emission valence spectra at different electron excitation energies (3–10 keV), and the results are compared with those of Rutherford backscattering.

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1.Tsaur, B., Weeks, M. M., Trubiano, R., and Pellegrini, P. W., IEEE Electr. Dev. Lett. 9, 650 (1988).
2.Tsaur, B., Chen, C. K., and Nechay, B. A., IEEE Electr. Dev. Lett. 11, 415 (1990).
3.Rodríguez, T., Wolters, H., Fernandez, M., Almendra, A., da Silva, M. F., Clement, M., Soares, J. C., and Ballesteros, C., Appl. Surf. Sci. 73, 182 (1993).
4.Rodríguez, T., Almendra, A., da Silva, M. F., Soares, J. C., Wolters, H., Rodriguez, A., and Sanz-Maudes, J., Nucl. Instrum. Methods in Phys. Res. B (in press).
5.Kurmaev, E. Z., Fedorenko, V. V., Shamin, S. N., Postnikov, A. V., Wiech, G., and Kim, Y., Physica Scripta T41, 288 (1992).
6.Galakhov, V. R., Kurmaev, E. Z., Fedorenko, V. V., Elkohina, L. V., Shamin, S. N., Pivin, J. C., Zaima, S., and Kojima, J., Surf. Sci. (to be published).
7.Galakhov, V. R., Kurmaev, E. Z., Shamin, S. N., Elokhina, L. V., Yarmoshenko, Yu.M., and Bukharaev, A. A., Appl. Surf. Sci. 72, 73 (1993).
8.Kurmaev, E. Z., Shamin, S. N., Galakhov, V. R., Wiech, G., Majkova, E., and Luby, S., J. Mater. Res. 10, 907 (1995).
9.Doolittle, L. R., Rutherford Backscattering Data Manipulation Program, RUMP-3.4x User's Guides (Cornell University, Ithaca, NY, 1985, 1991).
10.Yakowitz, H. and Newbury, D. E., SEM/1976/I, II T (Research Institute, Chicago, 1976), p. 151.
11.Castaing, R., Adv. Electron. Electron Phys. 13, 317 (1960).

Solid-phase reactions in Ir/(111)Si systems studied by means of x-ray emission spectroscopy

  • E. Z. Kurmaev (a1), V. R. Galakhov (a1), S. N. Shamin (a1), T. Rodríguez (a2), A. Almendra (a2), J. Sanz-Maudes (a2), K. Göransson (a3) and I. Engström (a3)...

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