Skip to main content Accessibility help

Quantitative investigation of titanium/amorphous-silicon multilayer thin film reactions

  • R. R. De Avillez (a1), L. A. Clevenger (a1), C. V. Thompson (a1) and K. N. Tu (a2)


Growth of amorphous-titanium-silicidc and crystalline C49 TiSi2 in titanium/amorphous-silicon multilayer films was investigated using a combination of differential scanning calorimetry (DSC), thin film x-ray diffraction, Auger depth profiling, and cross-sectional transmission electron microscopy. The multilayer films had an atomic concentration ratio of 1Ti to 2Si and a modulation period of 30 nm. In the as-deposited condition, a thin amorphous-titanium-silicide layer was found to exist between the titanium and silicon layers. Heating the multilayer film from room temperature to 700 K caused the release of an exothermic heat over a broad temperature range and an endothermic heat over a narrow range. The exothermic hump was attributed to thickening of the amorphous-titanium silicide layer, and the endothermic step was attributed to the homogenization and/or densification of the amorphous-silicon and amorphous-titanium-silicide layers. An interpretation of previously reported data for growth of amorphous-titanium-silicide indicates an activation energy of 1.0 ± 0.1 eV and a pre-exponential coefficient of 1.9 × 10−7 cm2/s. Annealing at high temperatures caused formation of C49 TiSi2 at the amorphous-titanium-silicide/amorphous-silicon interfaces with an activation energy of 3.1 ± 0.1 eV. This activation energy was attributed to both the nucleation and the early stages of growth of C49 TiSi2. The heat of formation of C49 TiSi2 from a reaction of amorphous-titanium-silicide and crystalline titanium was found to be –25.8 ± 8.8 kJ/mol and the heat of formation of amorphous-titanium-silicide was estimated to be –130.6 kJ/mol.



Hide All
1Murarka, S. P., Silicides for VLSI Applications (Academic Press, New York, 1983).
2Holloway, K. and Sinclair, R., J. Appl. Phys. 61, 1359 (1987).
3Butz, R., Rubloff, G.W., Tan, T.Y., and Ho, P. S., Phys. Rev. B 30, 5421 (1984)
4Rubloff, G.W., Tramp, R. M., and van Loenen, E. J., Appl. Phys. Lett. 48, 1600 (1986).
5Clevenger, L.A., Thompson, C.V., Judas, A., and Tu, K. N., First MRS International Meeting on Advanced Materials 10, 431 (1989).
6Clevenger, L.A., Thompson, C.V., Cammarata, R. C., and Tu, K. N., Appl. Phys. Lett. 52, 795 (1988).
7Tu, K. N., Chu, W. K., and Mayer, J.W., Thin Solid Films 25, 403 (1975).
8Clevenger, L. A., Thompson, C.V., Cammarata, R. C., and Tu, K. N., Mater. Res. Symp. Proc. 103, 191 (1988).
9Nathan, M., J. Appl. Phys., 63, 5539 (1988).
10De Avillez, R. R., Clevenger, L. A., and Thompson, C.V., J. Mater. Res. 4 (5), 1057 (1989).
11Beyers, R. and Sinclair, R., J. Appl. Phys. 57, 5240 (1985).
I2Kissinger, H.E., Anal. Chem. 29, 1702 (1957).
13Boswell, P. G., J. Thermal. Anal. 18, 353 (1980).
14Coffey, K.R., Clevenger, L.A., Barmak, K., Rudman, D.A., and Thompson, C.V., Appl. Phys. Lett. 55, 852 (1989).
15Holloway, K. and Sinclair, R., J. Less-Comm. Met. 140, 139 (1988).
16Cotts, E. J., Meng, W. J., and Johnson, W. L., Phys. Rev. Lett. 57, 2295 (1986).
17Chambers, S. A., Hill, D. M., Xu, F., and Weaver, J. H., Phys. Rev. B 35, 634 (1987).
18Tanner, L. E., Acta Metall. 28, 1805 (1980).
19Tanner, L. E. and Ray, R., Scripta Metall. 11, 783 (1977).
20Turnbull, D., TMS-AIME 221, 422 (1961).
21Hung, L. S., Gyulai, J., Mayer, J.W., Lau, S. S., and Nicolet, M. A., J. Appl. Phys. 54, 5076 (1983).
22Hultgren, R., Orr, R. L., Anderson, P. D., and Kelley, K. K., Selected Values of Thermodynamic Properties of Metals and Alloys (J. Wiley, New York, 1963).
23Donovan, E.P., Spaepen, F., Turnbull, D., Poate, J. M., and Jacobson, D.C., J. Appl. Phys. 57, 4208 (1985).

Quantitative investigation of titanium/amorphous-silicon multilayer thin film reactions

  • R. R. De Avillez (a1), L. A. Clevenger (a1), C. V. Thompson (a1) and K. N. Tu (a2)


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed