Skip to main content Accessibility help
×
Home

Oxidation of nanocrystalline Mo–Si–N and nanolayered Mo–Si–N/SiC coatings

  • P. Torri (a1)

Abstract

Oxidation of sputter-deposited nanocrystalline Mo–Si–N (MoSi2.2N2.5) coatings in oxygen–water vapor atmosphere has been studied in the temperature range 400–850 °C. In addition, the oxidation properties of nanolayered Mo–Si–N/SiC coatings at 700 °C were studied and compared to those of single-layer coatings of both components. No pest disintegration was observed in Mo–Si–N up to 200 h of oxidation. A preexponential rate constant of (3.7 ± 0.5) × 109 (1015 atoms/cm2)2/h and activation energy 1.03 ± 0.02 eV were determined from an Arrhenius plot for parabolic oxygen buildup on Mo–Si–N. Up to 20% less oxygen was detected in the oxidized nanolayered coatings compared to either of the components as a single layer, indicating an improvement in oxidation resistance.

Copyright

References

Hide All
1.Petrovic, J.J., MRS Bull. XVIII(7), 35 (1993).
2.Petrovic, J.J. and Vasudevan, A.K., in High-Temperature Silicides and Refractory Alloys, edited by Briant, C.L., Petrovic, J.J., Bewlay, B.P., Vasudevan, A.K., and Lipsitt, H.A. (Mater. Res. Soc. Symp. Proc. 322, Pittsburgh, PA, 1994), p. 3.
3.Vasudevan, A.K. and Petrovic, J.J., Mater. Sci. Eng. A155, 1 (1992).
4.Kircher, T.A. and Courthright, E.L., Mater. Sci. Eng. A155, 67 (1992).
5.Grabke, H.J. and Meier, G.H., Oxid. Met. 44(1/2), 147 (1995).
6.Berztiss, D.A., Pettit, F.S., and Meier, G.H., in High-Temperature Ordered Intermetallic Alloys VI, edited by Horton, J., Hanada, S., Bake, I., Noebe, R.D., and Schwartz, D. (Mater. Res. Soc. Symp. Proc. 364, Pittsburgh, PA, 1995), p. 1285.
7.Berztiss, D.A., Cerchiara, R.R., Gulbransen, E.A., Pettit, F.S., and Meier, G.H., Mater. Sci. Eng. A155, 165 (1992).
8.Meschter, P.J., Met. Trans. 23A, 1763 (1992).
9.Meschter, P.J., Scr. Metall. 25, 521 (1991).
10.Lu, T.C., Evans, A.G., Hecht, R.J., and Mehrabian, R., Acta Metall. 39, 1853 (1991).
11.Castro, R.G., Smith, R.W., Rollet, A.D., and Stanek, P., Scr. Metall. 26, 207 (1992).
12.Jeng, Y-L., Wolfenstine, J., and Lavernia, E.J., Scr. Metall. 28, 458 (1993).
13.Cook, J., Khan, A., Lee, E., and Mahapatra, R., Mater. Sci. Eng. A155, 183 (1992).
14.Gedenvanishvili, S. and Munir, Z.A., Scr. Metall. 31(6), 741 (1994).
15.Henager, C.H. and Brimhall, J.L., Scr. Metall. 26, 585 (1992).
16.Meschter, P.J., Scr. Metall. 25, 1065 (1991).
17.Lu, G-Y., Lederich, R., and Soboyejo, W., Mater. Sci. Eng. A210, 25 (1996).
18.Miller, P.D., Lee, J.G., and Cutler, I.B., J. Am. Ceram. Soc. 62, 147 (1979).
19.Kung, H., Jervis, T.R., Hirvonen, J-P., Embury, J.D., Mitchell, T.E., and Nastasi, M., Philos. Mag. A 71, 759 (1995).
20.Hirvonen, J-P., Torri, P., Lappalainen, R., Likonen, J., Kung, H., Jervis, T.R., and Nastasi, M., J. Mater. Res. 13, 965 (1998).
21.Kung, H., Jervis, T.R., Hirvonen, J-P., Mitchell, T.E., and Nastasi, M., J. Vac. Sci. Technol. B. 13(3), 1126 (1995).
22.Lu, K., Mater. Sci. Eng. R16, 161 (1996).
23.Lappalainen, R., Pannikkat, A., and Raj, R., Acta Metall. Mater. 41, 1229 (1993).
24.Greer, A.L. in Mechanical Properties and Deformation Behavior of Materials Having Ultra-Fine Microstructures, edited by Nastasi, M., Parkin, D.M., and Gleiter, H. (Kluwer Academic Publishers, Dordrecht, Netherlands, 1993).
25.Hirvonen, J-P., Suni, I., Kattelus, H., Lappalainen, R., Torri, P., Kung, H., Jervis, T.R., Nastasi, M., and Tesmer, J.R., Surf. Coat. Technol. 74–75, 981 (1995).
26.Torri, P., Hirvonen, J-P., Kung, H., Lu, Y-C., Nastasi, M., and Gibson, P.N., J. Vac. Sci. Technol. B 17(4), 1329 (1999).
27.Govindarajan, S., Moore, J.J., Ohno, T.R., and Disam, J., Surf. Coat. Technol. 94–95, 7 (1997).
28.Jokinen, J., Keinonen, J., Tikkanen, P., Kuronen, A., Ahlgren, T., and Nordlund, K., Nucl. Instrum. Methods B 119, 533 (1996).
29.Ramberg, C.E., M.S. Thesis, The Pennsylvania State University (1992).
30.Ramberg, C.E., Beatrice, P., Kurokawa, K., and Worrel, W.L., in High-Temperature Silicides and Refractory Alloys, edited by Briant, C.L., Petrovic, J.J., Bewlay, B.P., Vasudevan, A.K., and Lipsitt, H.A. (Mater. Res. Soc. Symp. Proc. 322, Pittsburgh, PA, 1994), p. 243.
31.Larsson, M., Bromark, M., Hedenqvist, P., and Hogmark, S., Surf. Coat. Technol. 76–77, 202 (1995).

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed