Skip to main content Accessibility help
×
Home

The oxidation of an aluminum nitride powder studied by bremsstrahlung-excited Auger electron spectroscopy and x-ray photoelectron spectroscopy

  • Pu Sen Wang (a1), Subhas G. Malghan (a1), Stephen M. Hsu (a1) and Thomas N. Wittberg (a2)

Abstract

Bremsstrahlung-excited Auger electron spectroscopy (AES) was used to study the oxidation kinetics of an aluminum nitride powder oxidized in air at 750, 800, 850, and 900 °C. An equation was derived to calculate the average surface oxide film thickness from the aluminum AES spectra. The oxidation of this powder was found to follow a parabolic rate law within this temperature range. The measured activation energy was 230 ± 17 kJ/mol (55 ± 4 kcal/mol). Analysis with x-ray photoelectron spectroscopy (XPS) showed that in addition to the nitride N 1s peak, there was a second N 1s peak. This peak has been observed in previous studies and can be attributed to N-O bonding either within the growing oxide film or at the Al2O3/AlN interface.

Copyright

References

Hide All
1Katnani, A. D. and Papathomas, K. I., J. Vac. Sci. Technol. A 5, 1335 (1987).
2Barthelme, P., Ansorge, F., Kulig, M., Hoffman, T., and Russel, C., Euro-Ceramics 1, Processing of Ceramics, edited by de With, G.et al. (Elsevier Applied Science, New York, 1989).
3Dupuie, J. L. and Gulari, E., J. Vac. Sci. Technol. A 10, 18 (1992).
4Liao, H. M., Sodhi, R. N. S., and Coyle, T. W., J. Vac. Sci. Technol. A 11, 2681 (1993).
5Wang, P. S., Hsu, S. M., Malghan, S. G., and Wittberg, T. N., J. Mater. Sci. 26, 3249 (1991).
6Wang, P. S., Malghan, S. G., Hsu, S. M., and Wittberg, T. N., J. Mater. Res. 8, 3168 (1993).
7Wang, P. S., Malghan, S. G., Hsu, S. M., and Wittberg, T. N., Surface and Interface Analysis 21, 155 (1994).
8Wang, P. S., Hsu, S. M., and Wittberg, T. N., J. Mater. Sci. 26, 1655 (1991).
9Wang, P. S., Malghan, S. G., Hsu, S. M., and Wittberg, T. N., Surface and Interface Analysis 18, 159 (1992).
10Wang, P. S., Malghan, S. G., Hsu, S. M., and Wittberg, T. N., Surface and Interface Analysis 20, 105 (1993).
11Certain commercial equipment, instruments, or materials are identified in this paper in order to specify adequately the experimental procedure. Such identification does not imply recommendation or endorsement by the National Institute of Standards and Technology, nor does it imply that the materials or equipment identified are necessarily the best available for the purpose.
12Press, W. H., Flannery, B. P., Teukolsky, S. A., and Vetterling, W. T., Numerical Recipes (Cambridge University Press, New York, 1987), pp. 400, 407420, 523528.
13Shirley, D. A., Phys. Rev. B 5, 4709 (1972).
14Strohmeier, B. R., Surface and Interface Analysis 15, 51 (1990).
15Tanuma, S., Powell, C. J., and Penn, D. R., Surface and Interface Analysis 17, 927 (1991).
16Handbook of Chemistry and Physics, 70th ed. edited by Weast, R. C. (Chemical Rubber, Boca Raton, FL, 1989), p. B-68.
17Pantano, C. G. Jr., private communication.

Related content

Powered by UNSILO

The oxidation of an aluminum nitride powder studied by bremsstrahlung-excited Auger electron spectroscopy and x-ray photoelectron spectroscopy

  • Pu Sen Wang (a1), Subhas G. Malghan (a1), Stephen M. Hsu (a1) and Thomas N. Wittberg (a2)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed.