Optical propagation loss reduction in ZnO thin films under CO2 laser treatment

M. Bertolotti; M. V. Laschena; M. Rossi; A. Ferrari; L. S. Qian; F. Quaranta; A. Valcntini

doi:10.1557/JMR.1990.1929

Abstract

The reduction of propagation losses in ZnO thin film waveguides for integrated optics after CO2 laser treatment is studied. RHEED patterns show that the measured decrease of optical losses is accompanied by an increase of ordering after the laser treatment. The reordering depends on the initial film state and the laser irradiation conditions.

References

¹Dutta, S., Jackson, H. E., Boyd, J. T., Hickernell, F. S., and Davis, R. L., Appl. Phys. Lett. 39, 206 (1981).CrossRef Google Scholar

²Dutta, S., IEEE J. Quantum Electron. QE18, 800 (1982).CrossRef Google Scholar

³Bertolotti, M., Ferrari, A., Jaskow, A., Palma, A., and Verona, E., J. Appl. Phys. 56, 2943 (1984).CrossRef Google Scholar

⁴Valentini, A., Quaranta, F., Rossi, M., and Vasanelli, L., Thin Solid Films 175, 255 (1989).CrossRef Google Scholar

Crossref Citations

This article has been cited by the following publications. This list is generated based on data provided by Crossref.

Schuler, T and Aegerter, M.A 1999. Optical, electrical and structural properties of sol gel ZnO:Al coatings. Thin Solid Films, Vol. 351, Issue. 1-2, p. 125.

Schuler, T. and Aegerter, M.A. 1999. Coatings on Glass 1998. p. 197.

Jiwei, Zhai Liangying, Zhang and Xi, Yao 2000. The dielectric properties and optical propagation loss of c-axis oriented ZnO thin films deposited by sol–gel process. Ceramics International, Vol. 26, Issue. 8, p. 883.

Malkomes, N. Vergöhl, M. and Szyszka, B. 2001. Properties of aluminum-doped zinc oxide films deposited by high rate mid-frequency reactive magnetron sputtering. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 19, Issue. 2, p. 414.

Lin, Su-Shia Huang, Jow-Lay and Šajgalik, P 2004. The properties of heavily Al-doped ZnO films before and after annealing in the different atmosphere. Surface and Coatings Technology, Vol. 185, Issue. 2-3, p. 254.

Ali, H.M. Abd El-Raheem, M.M. Megahed, N.M. and Mohamed, H.A. 2006. Optimization of the optical and electrical properties of electron beam evaporated aluminum-doped zinc oxide films for opto-electronic applications. Journal of Physics and Chemistry of Solids, Vol. 67, Issue. 8, p. 1823.

Kuo, Shou-Yi Chen, Wei-Chun Lai, Fang-I Cheng, Chin-Pao Kuo, Hao-Chung Wang, Shing-Chung and Hsieh, Wen-Feng 2006. Effects of doping concentration and annealing temperature on properties of highly-oriented Al-doped ZnO films. Journal of Crystal Growth, Vol. 287, Issue. 1, p. 78.

Kuo, Shou-Yi Lai, Fang-I Chen, Wei-Chun Cheng, Chin-Pao Kuo, Hao-Chung and Wang, Shing-Chung 2006. Ultraviolet Lasing of Sol–Gel-Derived Zinc Oxide Polycrystalline Films. Japanese Journal of Applied Physics, Vol. 45, Issue. 4S, p. 3662.

Sahu, D.R. Lin, Shin-Yuan and Huang, Jow-Lay 2007. Improved properties of Al-doped ZnO film by electron beam evaporation technique. Microelectronics Journal, Vol. 38, Issue. 2, p. 245.

Zhou, Hong-ming Yi, Dan-qing Yu, Zhi-ming Xiao, Lai-rong and Li, Jian 2007. Preparation of aluminum doped zinc oxide films and the study of their microstructure, electrical and optical properties. Thin Solid Films, Vol. 515, Issue. 17, p. 6909.

Kwon, Y. B. Abouzaid, M. Ruterana, P. and Je, J. H. 2007. Structural and electrical properties of Zn(Al)O layers for transparent metal oxide applications. physica status solidi (b), Vol. 244, Issue. 5, p. 1583.

Hsiao, Chi-Sheng Chen, San-Yuan and Cheng, Syh-Yuh 2008. Synthesis and physical characteristics of AlOx-coated ZnO nanorod arrays grown in aqueous solution at low temperatures. Journal of Physics and Chemistry of Solids, Vol. 69, Issue. 2-3, p. 625.

Lo, Shih-Shou Huang, Dison Tu, Chun Hsiang Hou, Chia-Hung and Chen, Chii-Chang 2009. Raman scattering and band-gap variations of Al-doped ZnO nanoparticles synthesized by a chemical colloid process. Journal of Physics D: Applied Physics, Vol. 42, Issue. 9, p. 095420.

Barreca, Davide Bekermann, Daniela Devi, Anjana Fischer, Roland A. Gasparotto, Alberto Maccato, Chiara Tondello, Eugenio Rossi, Marco Orlanducci, Silvia and Terranova, Maria Letizia 2010. Novel insight into the alignment and structural ordering of supported ZnO nanorods. Chemical Physics Letters, Vol. 500, Issue. 4-6, p. 287.

He, H. Y. and Yu, H. Y. 2011. Enhancement in optical transmission of ZnO: Al film by c-orientation arrayed growth. International Journal of Materials Research, Vol. 102, Issue. 5, p. 556.

He, Hai Yan and Guo, Jian-Ming 2011. Enhancement in the optical transmittance of ZnO:Al powders by Si co-doping. Micro & Nano Letters, Vol. 6, Issue. 8, p. 725.

Ueno, Naoyuki Yamamoto, Akinobu Uchida, Yoshiaki Egashira, Yasuyuki and Nishiyama, Norikazu 2012. Low-temperature hydrothermal synthesis of ZnO nanosheet using organic/inorganic composite as seed layer. Materials Letters, Vol. 86, Issue. , p. 65.

He, H.Y. and Liang, Q. 2012. Enhancement in the optical transmittance of ZnO:Al powders by Mo co-doping. Current Applied Physics, Vol. 12, Issue. 3, p. 865.

He, H.-Y. Chen, P. and Wang, L.-L. 2013. Enhancement in the Optical Properties of ZnO:Al Nanopowders by Sn Codoping. JOM, Vol. 65, Issue. 6, p. 690.

Hung, Yi-Ting and Lo, Shih-Shou 2013. ZnS/ZnO/ZnS core/shell/shell hollow spheres and its optical properties. p. 103.

Download full list

Article contents

Optical propagation loss reduction in ZnO thin films under CO2 laser treatment

Abstract

Access options

References

This article has been cited by the following publications. This list is generated based on data provided by Crossref.

Article contents

Optical propagation loss reduction in ZnO thin films under CO2 laser treatment

Abstract

Access options

References

Save article to Kindle

Save article to Dropbox

Save article to Google Drive

Reply to: Submit a response

Your details

You have entered the maximum number of contributors

Conflicting interests