Skip to main content Accessibility help
×
Home

On the oxidation resistance of superhard Ti–Si–C–N coatings

  • Yan Guo (a1), Shengli Ma (a1), Kewei Xu (a1), Tom Bell (a2), Xiaoying Li (a3) and Hanshan Dong (a3)...

Abstract

The oxidation behavior of three types of plasma-enhanced chemical vapor deposition (PECVD) processed Ti–Si–C–N coatings with silicon content ranging from 4.3 to 11.6 at.% has been investigated at high temperatures. Systematic characterization was conducted to study the evolution of composition, phase constituents, hardness, surface morphologies, microstructures, and grain size during oxidation. A two-stage oxidation process was observed between 700 and 1000 °C for all three coatings. Experimental results indicate that a superhardness of 40 GPa can be maintained up to 700, 800, and 850 °C for 4.3, 7.4, and 11.6 at.% Si coatings, respectively; the dual-phased 7.4 and 11.6 at.% Si coatings show a better oxidation resistance than the single-phased 4.3 at.% Si coating. On the basis of the results, a mechanism is proposed to explain the relationship between the nanostructure and oxidation behavior.

Copyright

Corresponding author

a)Address all correspondence to this author. e-mail: kwxu@mail.xjtu.edu.cn

References

Hide All
1Sun, Z., Zhou, Y.Li, M.: High temperature oxidation behavior of Ti3SiC2-based material in air. Acta Mater. 49, 4347 2001
2Kim, K.H.Lee, S.H.: Comparative studies of TiN and Ti1–xAlxN by plasma-assisted chemical vapor deposition using a TiCl4/AlCl3/N4/H2/Ar gas mixture. Thin Solid Films 307, 113 1997
3Veprek, S., Reiprich, S.Li, S.: Superhard nanocrystalline composite materials: The c-TiN/a–Si3N4 system. Appl. Phys. Lett. 66, 2640 1995
4Zhang, C.H., Liu, Z-J., Li, K.Y., Shen, Y.G.Luo, J.B.: Microstructure, surface morphology, and mechanical properties of nanocrystalline TiN/amorphous Si3N4 composite films synthesized by ion-beam-assisted deposition. J. Appl. Phys. 95, 1460 2004
5Choi, J.B., Cho, K., Lee, M-H.Kim, K.H.: Effect of Si content and free Si on oxidation behavior of Ti–Si–N coating layers. Thin Solid Films 447–448, 365 2004
6Li, Y.S., Shimada, S., Kiyono, H.Hirose, A.: Synthesis of Ti–Al–Si–N nanocomposite films using liquid injection PECVD from alkoxide precursors. Acta Mater. 54, 2041 2006
7Zou, B., Huang, C., Chen, M., Gu, M.Liu, H.: Study of the mechanical properties, toughening and strengthening mechanisms of Si3N4/Si3N4w/TiN nanocomposite ceramic tool materials. Acta Mater. 55, 4193 2007
8Zhang, R.F.Veprek, S.: On the spinodal nature of the phase segregation and formation of stable nanostructure in the Ti–Si–N system. Mater. Sci. Eng., A 424, 128 2006
9Ma, S.L., Ma, D.Y., Guo, Y., Xu, B., Wu, G.Z., Xu, K.W.Chu, P.K.: Synthesis and characterization of super hard, self-lubricating Ti–Si–C–N nanocomposite coatings. Acta Mater. 55, 6350 2007
10Ma, S.L., Xu, K.W.He, J.W.: Parametric effects of residual stress in pulse dc plasma enhanced CVD TiN coatings. Surf. Coat. Technol. 142–144, 1023 2001
11Sahoo, T., Tripathy, S.K., Mohapatra, M., Anand, S.Das, R.P.: X-ray diffraction and microstructural studies on hydrothermally synthesized cubic barium titanate from TiO2-Ba(OH)2-H2O system. Mater Lett. 61, 1323 2007
12Sambasivan, S.Petuskey, W.T.: Phase chemistry in the Ti–Si–N system: Thermo chemical review with phase stability diagrams. J. Mater. Res. 9, 2362 1994
13Guo, Y., Ma, S., Xu, K., Bell, T., Li, X.Dong, H.: Transmission electron microscopy microstructural characterization of Ti– Si–C–N coatings. J. Mater. Res. 23, 198 2008
14Guo, Y., Ma, S., Xu, K.Bell, T.: Nanostructured phase transition of super-hard Ti–Si–C–N coatings. Nanotechnology 19, 561 2008
15Lu, Y.H., Shen, Y.G., Zhou, Z.F.Li, K.Y.: Effects of nitrogen content on microstructure and oxidation behaviors of Ti–B–N nanocomposite thin films. J. Vac. Sci. Technol., A 24, 340 2006
16Hofmann, S.: Formation and diffusion properties of oxide films on metals and on nitride coatings studied with Auger electron spectroscopy and x-ray photoelectron spectroscopy. Thin Solid Films 193–194, 648 1990

Keywords

On the oxidation resistance of superhard Ti–Si–C–N coatings

  • Yan Guo (a1), Shengli Ma (a1), Kewei Xu (a1), Tom Bell (a2), Xiaoying Li (a3) and Hanshan Dong (a3)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed