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Novel photoluminescence from hydrogenated amorphous carbon films prepared by using xylene source

  • Jun Xu (a1), Wei Li (a2), Tianfu Ma (a2), Zhifeng Li (a3), Li Wang (a3) and Kunji Chen (a3)...

Abstract

Hydrogenated amorphous carbon thin films were prepared by using organic hydrocarbon source, xylene (C8H10), in a plasma enhanced chemical vapor deposition-(PECVD) system. In contrast to a single broad PL peak from methane (CH4)-based hydrogenated amorphous carbon films, a new PL feature was observed from xylene-based a–C:H films in the blue-green light region. It was found that the aromatic-structures were enhanced in xylene-based a–C:H films deposited at high radio frequency power, which may result in the existence of luminescence centers in the carbon films and induce the appearance of a new PL peak.

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a)Address all correspondence to this author. e-mail: junxu@netra.nju.edu.cn

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Novel photoluminescence from hydrogenated amorphous carbon films prepared by using xylene source

  • Jun Xu (a1), Wei Li (a2), Tianfu Ma (a2), Zhifeng Li (a3), Li Wang (a3) and Kunji Chen (a3)...

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