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Nanopatterned optical and magnetic La0.6Ca0.4MnO3 arrays: Synthesis, fabrication, and properties

  • Ming-Chung Wu, Chih-Min Chuang, Jhih-Fong Lin, Yu-Ching Huang (a1), Yang-Fang Chen (a2) and Wei-Fang Su (a1)...


We have fabricated La0.6Ca0.4MnO3 periodic arrays exhibiting tunable optical properties and magnetic properties using nontoxic and environmentally friendly electron beam resist made from La0.6Ca0.4MnO3 sol-gel precursor. We studied their unique optical properties by using the spectral microreflectometer and their magnetic properties using the superconducting quantum interference device and magnetic force microscopy. Additionally, the resist has the ability to demonstrate both positive and negative resist behaviors depending on the electron beam dosage. With these special characteristics, we can fabricate periodic structure on a thin film possessing controlled optical reflectance properties with one fixed design electron beam pattern without changing the structural parameters but changing the electron beam dosage only. Our approach provides an uncomplicated route for the fabrication of nanometer scale magnetic patterns, which serve as the building blocks in the search for novel properties of periodic magnetic arrays.


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1.Wu, C.S., Lin, C.F., Lin, H.Y., Lee, C.L., Chen, C.D.: Polymer-based photonic crystals fabricated with single-step electron-beam lithography. Adv. Mater. 19, (19)3052 (2007)
2.Chueh, Y.L., Ko, M.T., Chou, L.J., Chen, L.J., Wu, C.S., Chen, C.D.: TaSi2 nanowires: A potential field emitter and interconnect. Nano Lett. 6, (8)1637 (2006)
3.Clendenning, S.B., Aouba, S., Rayat, M.S., Grozen, D., Sorge, J.B., Broderson, P.M., Sodhi, R.M.S., Lu, Z.H., Yip, C.M., Freeman, M.R., Ruda, H.E., Manners, I.: Direct writing of patterned ceramics using electron-beam lithography and metallopolymer resists. Adv. Mater. 16, (3)215 (2004)
4.MacLachlan, M.J., Ginzburg, M., Coombs, N., Coyle, T.W., Raju, N.P., Greedan, J.E., Ozin, G.A., Manners, I.: Shaped ceramics with tunable magnetic properties from metal-containing polymers. Science 287, 1460 (2000)
5.Saifullah, M.S.M., Subramanian, K.R.V., Kang, D.J., Anderson, D., Huck, W.T.S., Jones, G.A.C., Welland, M.E.: Sub-10 nm high-aspect-ratio patterning of ZnO using an electron beam. Adv. Mater. 17, (14)1757 (2005)
6.Subramanian, K.R.V., Saifullah, M.S.M., Tapley, E., Kang, D.J., Welland, M.E., Butler, M.: Direct writing of ZrO2 on a sub-10 nm scale using an electron beam. Nanotech. 15, (1)158 (2004)
7.Alexe, M., Harnagea, C., Visinoiu, A., Pignolet, A., Hesse, D., Gösele, U.: Patterning and switching of nano-size ferroelectric memory cells. Scr. Mater. 44, (8)1175 (2001)
8.Chen, J.K., Ko, F.H., Chen, H.L., Chang, F.C.: Mechanism and modeling of ring pattern formation for electron beam exposure on zwitterresist. Jpn. J. Appl. Phys. 42, 3838 (2003)
9.Chen, J.K., Ko, F.H., Chang, F.C.: Structural transformation of acrylic resin upon controlled electron-beam exposure yields positive and negative resists. Adv. Funct. Mater. 15, (7)1147 (2005)
10.Lin, Q., Steinhäusler, T., Simpson, L., Wilder, M., Medeiros, D.R., Willson, C.G., Havard, J., Fréchet, J.M.J.A.: Water-castable, water-developable chemically amplified negative-tone resist. Chem. Mater. 9, (8)1725 (1997)
11.Havard, J.M., Shim, S.Y., Fréchet, J.M.J., Lin, Q., Medeiros, D.R., Willson, C.G., Byers, J.D.: Design of photoresists with reduced environmental impact. 1. Water-soluble resists based on photo-cross-linking of poly(vinyl alcohol). Chem. Mater. 11, (3)719 (1999)
12.Havard, J.M., Vladimirov, N., Fréchet, J.M.J., Yamada, S., Willson, C.G., Byers, J.D.: Photoresists with reduced environmental impact: Water-soluble resists based on photo-cross-linking of a sugar-containing polymethacrylate. Macromol. 32, (1)86 (1999)
13.Cooper, I.A.: Recent developments in materials synthesis and processing using supercritical CO2. Adv. Mater. 13, (14)1111 (2001)
14.Cheng, J.Y., Ross, C.A., Smith, H.I., Thomas, E.L.: Templated self-assembly of block copolymers: Top-down helps bottom-up. Adv. Mater. 18, (19)2505 (2006)
15.Cao, J.R., Lee, P.T., Choi, S.J., Dapkus, J.D., Dapkus, P.D.: Lithographic fine-tuning of vertical cavity surface emitting laser-pumped two-dimensional photonic crystal lasers. J. Nanosci. Nanotechnol. 2, (3–4)313 (2002)
16.Chen, Y.L., Chen, C.C., Jeng, J.C., Chen, Y.F.: Enhancement of optical properties of CdSe pillars fabricated by the combination of electron-beam lithography and electrochemical deposition. Appl. Phys. Lett. 85, (7)1259 (2004)
17.Yablonovitch, E.: Inhibited spontaneous emission in solid-state physics and electronics. Phys. Rev. Lett. 58, (20)2059 (1987)
18.John, S.: Strong localization of photons in certain disordered dielectric superlattices. Phys. Rev. Lett. 58, (23)2486 (1987)
19.Fleischhaker, F., Zentel, R.: Photonic crystals from core-shell colloids with incorporated highly fluorescent quantum dots. Chem. Mater. 17, (6)1346 (2005)
20.Yan, Q., Zhou, Z., Zhao, X.S.: Introduction of three-dimensional extrinsic defects into colloidal photonic crystals. Chem. Mater. 17, (12)3069 (2005)
21.Chuang, C.M., Lu, W.B., Su, W.F., Lin, C.M., Chen, Y.F.: Manipulation of luminescence from CdSe nanoparticles by 3-D photonic crystal. J. Appl. Phys. 97, 096104 (2005)
22.Srivastava, P., Srivastava, O.N., Singh, H.K., Siwach, P.K.: Synthesis and magnetotransport properties of Mm-doped La0.7Ca0.3MnO3. J. Alloys Compd. 459, (1–2)61 (2008)
23.Tang, F.L., Zhang, X.V.: Atomic distribution and local structure in charge-ordered La1/3Ca2/3MnO3. Phys. Rev. B: Condens. Matter 73, (14)144401 (2006)
24.Dabrowski, B., Dybzinski, R., Bukowski, Z., Chmaissem, O., Jorgensen, J.D.: Oxygen content and structures of La1–xCaxMnO3+d as a function of synthesis conditions. J. Solid State Chem. 146, (2)448 (1999)
25.Mori, S., Chen, C.H., Cheong, S.W.: Pairing of charge-ordered stripes in (La,Ca)MnO3. Nature 392, (6675)473 (1998)
26.Chen, C.H., Cheong, S.W., Hwang, H.Y.: Charge-ordered stripes in La1–xCaxMnO3 with x > 0.5. J. Appl. Phys. 81, (8)4326 (1997)
27.Jin, S., Tiefel, T.H., McCormack, M., Fastnacht, R.A., Ramesh, R., Chen, L.H.: Thousandfold change in resistivity in magnetoresistive La-Ca-Mn-O films. Science 264, (5157)413 (1994)
28.Kim, K.H., Lee, S., Noh, T.W., Cheong, S.W.: Charge ordering fluctuation and optical pseudogap in La1–xCaxMnO3. Phys. Rev. Lett. 88, (16)167204 (2002)
29.Das, A., Chakraborty, K.R., Gupta, S.S., Kulshreshtha, S.K., Paranjpe, S.K.: Structural and magnetic ordering in La0.6Ca0.4MnO3. J. Magn. Magn. Mater. 237, (1)41 (2001)
30.Laiho, R., Lisunov, K.G., Lahderanta, E., Petrenko, P., Stamov, V.N., Zakhvalinskii, V.S.: Low-field magnetic properties of La1–xCaxMnO3 (0 < x < 0.4). J. Magn. Magn. Mater. 213, (3)271 (2000)
31.Gennes, P.G.D.: Effects of double exchange in magnetic crystals. Phys. Rev. 118, (1)141 (1960)
32.Wu, M.C., Chuang, C.M., Chen, Y.F., Su, Y.F.: Fabrication and optical properties of periodical structures based on a water-developable and tunable La0.7Sr0.3MnO3 resist.J. Mater. Chem. 18, 780 (2008)
33.Chuang, C.M., Wu, M.C., Huang, Y.C., Cheng, K.C., Lin, C.F., Chen, Y.F., Su, Y.F.: Nanolithography made from water-based spin-coatable LSMO resist. Nanotechnology 17, (14)4399 (2006)
34.Chakraborty, A., Devi, P.S., Roy, S., Maiti, H.S.: Low-temperature synthesis of ultrafine La0.84Sr0.16MnO3 powder by an autoignition process. J. Mater. Res. 9, (4)986 (1994)
35.Gaudon, M., Laberty-Robert, C., Ansart, F., Stevens, P., Rousset, A.: Preparation and characterization of La1–xSrxMnO3+d (0 < x < 0.6) powder by sol–gel processing. Solid State Sci. 4, (1)125 (2002)
36.Kuramochi, H., Uzumaki, T., Yasutake, M., Tanaka, A., Akinaga, H., Yokoyama, H.: A magnetic force microscope using CoFe-coated carbon nanotube probes. Nanotechnology 16, (1)24 (2005)
37.Lennard-Jones, J.E.: Cohesion. Proc. Phys. Soc. 43, (5)461 (1931)


Nanopatterned optical and magnetic La0.6Ca0.4MnO3 arrays: Synthesis, fabrication, and properties

  • Ming-Chung Wu, Chih-Min Chuang, Jhih-Fong Lin, Yu-Ching Huang (a1), Yang-Fang Chen (a2) and Wei-Fang Su (a1)...


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