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Microstructure of Epitaxial SrTiO3/Pt/Ti/ Sapphire Heterostructures

  • Steffen Schmidt (a1), Young-Woo Ok (a1), Dmitri O. Klenov (a1), Jiwei Lu (a1), Sean P. Keane (a1) and Susanne Stemmer (a1)...

Abstract

The microstructure and orientation relationships of epitaxial (111)-oriented SrTiO3 thin films grown by radio frequency magnetron sputtering on epitaxial (111)-oriented Pt/Ti electrodes on sapphire were investigated using x-ray diffraction, conventional and scanning transmission electron microscopy. We show that the epitaxial growth of (111)-oriented SrTiO3 films was promoted by thin Ti adhesion layers underneath the Pt electrode. The SrTiO3 films nucleated with two twin-related orientation variants, rotated by 180° about the 〈111〉 surface normal. The twin boundaries were oriented approximately normal to the film plane, but no strong preference for a specific boundary plane was observed. Growth mechanisms and the relationships to the dielectric properties are discussed.

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b) Address all correspondence to this author. e-mail: stemmer@mrl.ucsb.edu

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Keywords

Microstructure of Epitaxial SrTiO3/Pt/Ti/ Sapphire Heterostructures

  • Steffen Schmidt (a1), Young-Woo Ok (a1), Dmitri O. Klenov (a1), Jiwei Lu (a1), Sean P. Keane (a1) and Susanne Stemmer (a1)...

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