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Microstructural development in sol-gel derived lead zirconate titanate thin films: The role of precursor stoichiometry and processing environment

Published online by Cambridge University Press:  31 January 2011

M. J. Lefevre ,
J. S. Speck ,
R. W. Schwartz ,
D. Dimos  and
S. J. Lockwood
M. J. Lefevre
Affiliation:
Materials Department, University of California, Santa Barbara, Santa Barbara, California 93106–5050
J. S. Speck
Affiliation:
Materials Department, University of California, Santa Barbara, Santa Barbara, California 93106–5050
R. W. Schwartz
Affiliation:
Sandia National Laboratories, Albuquerque, New Mexico 87185
D. Dimos
Affiliation:
Sandia National Laboratories, Albuquerque, New Mexico 87185
S. J. Lockwood
Affiliation:
Sandia National Laboratories, Albuquerque, New Mexico 87185
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Abstract

The role of precursor stoichiometry and local firing environment on the microstructural development of sol-gel derived lead zirconate titanate (PZT) thin films was investigated. Typically, excess Pb is added to films to compensate for PbO volatilization during heat treatment. Here, it is shown that the use of stoichiometric precursors with either a PbO atmosphere powder or a PbO overcoat during the crystallization heat treatment is an attractive and viable alternative method for control of film stoichiometry. Using these approaches, we have fabricated single phase perovskite thin films with microstructures and electrical properties (Pr ∼ 36 μC/cm2 and Ec ∼ 45 kV /cm) comparable to those of films using optimized solution chemistries and excess Pb additions. The potential advantage of increasing PbO partial pressure, or activity, during firing versus excess Pb additions is discussed from the standpoint of a proposed crystallization scenario based on the kinetic competition between Pb loss and the nucleation and growth rates of the perovskite phase.

Type
Articles
Information
Journal of Materials Research , Volume 11 , Issue 8 , August 1996 , pp. 2076 - 2084
Copyright
Copyright © Materials Research Society 1996

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