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Microstructural characterization of a titanium-tungsten oxide gas sensor

Published online by Cambridge University Press:  31 January 2011

Matteo Ferroni ,
Vincenzo Guidi ,
Giuliano Martinelli  and
Giorgio Sberveglieri
Matteo Ferroni
Affiliation:
INFM, Department of Physics, University of Ferrara, Via Paradiso, 12-44100 Ferrara, Italy
Vincenzo Guidi
Affiliation:
INFM, Department of Physics, University of Ferrara, Via Paradiso, 12-44100 Ferrara, Italy
Giuliano Martinelli
Affiliation:
INFM, Department of Physics, University of Ferrara, Via Paradiso, 12-44100 Ferrara, Italy
Giorgio Sberveglieri
Affiliation:
INFM, Department of Chemistry and Physics for Materials, University of Brescia, Via Valotti, 9-25133 Brescia, Italy
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Abstract

Thin films of Ti–W–O were prepared from a W–Ti alloy target by rf magnetron sputtering in reactive atmosphere. Analysis devoted to investigate the microstructural properties of this material was carried out in order to explain the origin for the high sensing performance of a W–Ti-oxide gas sensor. Scanning and transmission electron microscopy techniques showed that after annealing the film consists of a polycrystalline layer, isostructural to tetragonal WO3, over which crystallites of pure WO3 are dispersed. The WO3 crystallites are insulated from each other and do not enter into the process of conduction of the layer. It was shown that Ti is soluted in the tetragonal WO3 lattice of the underlying layer. This layer exhibits fine granularity, which is an optimal feature for materials suited to gas sensing.

Type
Articles
Information
Journal of Materials Research , Volume 12 , Issue 3 , March 1997 , pp. 793 - 798
Copyright
Copyright © Materials Research Society 1997

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