Skip to main content Accessibility help
×
Home

Mechanical properties of compositionally modulated Au-Ni thin films: Nanoindentation and microcantilever deflection experiments

  • Shefford P. Baker (a1) and William D. Nix (a1)

Abstract

The mechanical properties of compositionally modulated Au-Ni films were investigated by submicrometer depth-sensing indentation and by deflection of micrometer-scale cantilever beams. Films prepared by sputter deposition with composition wavelengths between 0.9 and 4.0 nm were investigated. Strength was found to be high and invariant with composition wavelength. Experimental and data analysis methods were developed to provide more accurate and precise measurements of elastic stiffness. Large enhancements in stiffness (the “supermodulus effect”) were not observed. Rather, relatively small but significant minima were observed at a composition wavelength of about 1.6 nm by both techniques. These variations were found to be strongly correlated with variations in the average lattice parameter normal to the plane of the film. Both structural and mechanical property variations are consistent with a simple model in which the film consists of bulk-like Au and Ni layers with interfaces of constant thickness.

Copyright

References

Hide All
1Koehler, J. S., Phys. Rev. B 2, 547 (1970).
2Nix, W. D., Metall. Trans. A 20A, 2217 (1989).
3Schuller, I. K., Fartash, K., and Grimsditch, M., Mater. Res. Bull. XV, 33 (1990).
4Cammarata, R. C., Schlesinger, T. E., Kim, C., Qadri, S. B., and Edelstein, A. S., Appl. Phys. Lett. 56, 1862 (1990).
5Yang, W. M. C., Tsakalakos, T., and Hilliard, J. E., J. Appl. Phys. 48, 876 (1977).
6Testardi, L. R., Willens, R. H., Krause, J. T., McWhan, D.B., and Nakahara, S., J. Appl. Phys. 52, 510 (1981).
7Hénein, G.E. and Hilliard, J.E., J. Appl. Phys. 54, 728 (1983).
8Tsakalakos, T. and Hilliard, J. E., J. Appl. Phys. 54, 734 (1983).
9Baral, D., Ketterson, J. B., and Hilliard, J. E., J. Appl. Phys. 57, 1076 (1985).
10Jankowski, A. and Tsakalakos, T., J. Appl. Phys. 57, 1835 (1985).
11Baker, S. P., Ph.D. Dissertation, Stanford University (1993).
12Itozaki, H., Ph.D. Dissertation, Northwestern University (1982).
13Kueny, A., Grimsditch, M., Miyano, K., Banerjee, I., Falco, CM., and Schuller, I. K., Phys. Rev. Lett. 48, 166 (1982).
14Danner, R., Huebener, R. P., Chun, C. S. L., Grimsditch, M., and Schuller, I. K., Phys. Rev. B 33, 3696 (1986).
15Baumgart, P., Hillebrands, B., Mock, R., Giintherodt, G., Boufelfel, A., and Falco, CM., Phys. Rev. B 34, 9004 (1986).
16Bisanti, P., Brodsky, M. B., Felcher, G. P., Grimsditch, M., and Sill, L. R., Phys. Rev. B 35, 7813 (1987).
17Dutcher, J. R., Lee, S., Kim, J., Stegeman, G. I., and Falco, CM., Phys. Rev. Lett. 65, 1231 (1990).
18Davis, B. M., Seidman, D. N., Moreau, A., Ketterson, J. B., Mattson, J., and Grimsditch, M., Phys. Rev. B 43, 9304 (1991).
19Fartash, A., Fullerton, E. E., Schuller, I. K., Bobbin, S. E., Wagner, J. W., Cammarata, R. C., Kumar, S., and Grimsditch, M., Phys. Rev. B 44, 13760 (1991).
20Carlotti, G., Fioretto, D., Socino, G., Rodmaq, B., and Pelosin, V., J. Appl. Phys. 71, 4897 (1992).
21Clemens, B. M. and Eesley, G. L., Phys. Rev. Lett. 61, 2356 (1988).
22Moreau, A., Ketterson, J. B., and Davis, B., J. Appl. Phys. 68, 1622 (1990).
23Richardson, G., Makous, J. L., Yu, H. Y., and Edelstein, A. S., Phys. Rev. B 45, 12114 (1992).
24Berry, B. S. and Pritchet, W. C., Thin Solid Films 33, 19 (1976).
25Awano, H., Taniguchi, O., Katayama, T., Inoue, F., Itoh, A., and Kawanishi, K., J. Appl. Phys. 64, 6107 (1988).
26Pelosin, V., Rodmaq, B., Hillairet, J., Carlotti, G., Fioretto, D., and Socino, G., Mater. Sci. Forum 119–121, 359 (1993).
27Schuller, I. K. and Grimsditch, M., J. Vac. Sci. Technol. B 4, 1444 (1986).
28Baker, S. P. and Nix, W. D., J. Mater. Res. 9, 3140 (1994).
29Jankowski, A. F., Superlat. Microstruct. 6, 427 (1989).
30Nutt, S. R., Green, K. A., Baker, S. P., Nix, W. D., and Jankowski, A., in Thin Films: Stresses and Mechanical Properties, edited by Bravman, J. C., Nix, W. D., Barnett, D. M., and Smith, D. A. (Mater. Res. Soc. Symp. Proc. 130, Pittsburgh, PA, 1989), p. 129.
31Baker, S. P., Jankowski, A. F., Hong, S., and Nix, W. D., in Thin Films: Stresses and Mechanical Properties II, edited by Doerner, M. F., Oliver, W. C., Pharr, G. M., and Brotzen, F. R. (Mater. Res. Soc. Symp. Proc. 188, Pittsburgh, PA, 1990), p. 289.
32Jankowski, A. F., J. Appl. Phys. 71, 1782 (1992).
33Wall, M. A. and Jankowski, A. F., Thin Solid Films 181, 313 (1989).
34Nano Instruments Inc., “Nanoindenter,” Knoxville, TN.
35Doerner, M. F. and Nix, W. D., J. Mater. Res. 1, 601 (1986).
36Oliver, W. C. and Pharr, G. M., J. Mater. Res. 7, 1564 (1992).
37Lebouvier, D., Gilormini, P., and Felder, E., J. Phys. D: Appl. Phys. 18, 199 (1985).
38Laursen, T. A. and Simo, J. C., J. Mater. Res. 7, 618 (1992).
39Nano Instruments Inc., “Nanoindenter operation and analysis software,” Knoxville, TN.
40Field, J. E., in The Properties of Diamond (Academic Press, London, 1979).
41Weihs, T. P., Hong, S., Bravman, J. C., and Nix, W. D., J. Mater. Res. 3, 931 (1988).
42Hong, S., Weihs, T. P., Bravman, J. C., and Nix, W. D., in Thin Films: Stresses and Mechanical Properties, edited by Bravman, J. C., Nix, W. D., Barnett, D., and Smith, D. A. (Mater. Res. Soc. Symp. Proc. 130, Pittsburgh, PA, 1989), p. 93.
43Simmons, G. and Wang, H., Single Crystal Elastic Constants and Calculated Aggregate Properties: A Handbook (M.I.T. Press, Cambridge, MA, 1971).
44Timoshenko, S. and Goodier, J. N., Theory of Elasticity (McGraw-Hill, New York, 1970).
45Tabor, D., The Hardness of Metals (Oxford University Press, London, 1951).
46Feldman, C., Orway, F., and Bernstein, J., J. Vac. Sci. Technol. A 8, 117 (1990).
47Venkatraman, R. and Bravman, J. C., J. Mater. Res. 7, 2040 (1992).
48Pethica, J. B. and Oliver, W. C., in Thin Films: Stresses and Mechanical Properties, edited by Bravman, J. C., Nix, W. D., Barnett, D. M., and Smith, D. A. (Mater. Res. Soc. Symp. Proc. 130, Pittsburgh, PA, 1989), p. 13.
49Baker, S. P., in Thin Films: Stresses and Mechanical Properties TV, edited by Townsend, P. H., Weihs, T. P., Sanchez, J. E. Jr., and Børgesen, P. (Mater. Res. Soc. Symp. Proc. 308, Pittsburgh, PA, 1993).
50Vlassak, J. J. and Nix, W. D., Philos. Mag. A 67, 1045 (1993).
51Carlotti, G., Fioretto, D., Palmieri, L., Socino, G., Verdini, L., Xia, H., Hu, A., and Zhang, X. K., Phys. Rev. B 46, 12777 (1992).
52Xia, H., Zhang, X. K., Hu, A., Jiang, S. S., Peng, R. W., Zhang, W., Feng, D., Carlotti, G., Fioretto, D., Socino, G., and Verdini, L., Phys. Rev. B 47, 3890 (1993).

Related content

Powered by UNSILO

Mechanical properties of compositionally modulated Au-Ni thin films: Nanoindentation and microcantilever deflection experiments

  • Shefford P. Baker (a1) and William D. Nix (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed.