Hostname: page-component-7c8c6479df-94d59 Total loading time: 0 Render date: 2024-03-19T11:13:36.824Z Has data issue: false hasContentIssue false

Mechanical properties and thermal stability of (NbTiAlSiZr)Nx high-entropy ceramic films at high temperatures

Published online by Cambridge University Press:  12 October 2018

Qiu-Wei Xing
Affiliation:
The State Key Laboratory of Advanced Metals and Materials, University of Science and Technology Beijing, Beijing 10083, China
Song-Qin Xia
Affiliation:
The State Key Laboratory of Advanced Metals and Materials, University of Science and Technology Beijing, Beijing 10083, China
Xue-Hui Yan
Affiliation:
The State Key Laboratory of Advanced Metals and Materials, University of Science and Technology Beijing, Beijing 10083, China
Yong Zhang*
Affiliation:
The State Key Laboratory of Advanced Metals and Materials, University of Science and Technology Beijing, Beijing 10083, China; and Beijing Key Laboratory for Magneto-Photoelectrical Composite and Interface Science, University of Science and Technology Beijing, Beijing 100083, China
*
a)Address all correspondence to this author. e-mail: drzhangy@ustb.edu.cn
Get access

Abstract

High-entropy ceramic (HEC) films refer to the carbide, boride, oxide, or nitride films of the high-entropy alloy, which have potential applications under high temperatures. In this study, we fabricated the HEC NbTiAlSiZrNx films using magnetron sputtering under various deposition atmospheres. The phase structure evolution and the mechanical properties of three HEC films under high temperatures were investigated. The HEC films demonstrated good thermal stability as well as high hardness. After annealing for 24 h at 700 °C, the films remained in an amorphous phase without obvious crystallization, and the hardness of the films declined. Nanocrystallizations occurred in films deposited at a nitrogen flow rate of 4 sccm and 8 sccm after annealing for 30 min at 900 °C and exhibited an face-centered cubic structure. HEC NbTiAlSiZrNx films have potential applications as protective coatings under high temperatures.

Type
Article
Copyright
Copyright © Materials Research Society 2018 

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

Yeh, J.W., Chen, S.K., Lin, S.J., Gan, J.Y., Chin, T.S., Shun, T.T., Tsau, C.H., and Chang, S.Y.: Nanostructured high-entropy alloys with multiple principal elements: Novel alloy design concepts and outcomes. Adv. Eng. Mater. 6, 299 (2004).CrossRefGoogle Scholar
Gludovatz, B., Hohenwarter, A., Catoor, D., Chang, E.H., George, E.P., and Ritchie, R.O.: A fracture-resistant high-entropy alloy for cryogenic applications. Science 345, 1153 (2014).CrossRefGoogle ScholarPubMed
Xia, S.Q., Yang, X., Yang, T.F., Liu, S., and Zhang, Y.: Irradiation resistance in AlxCoCrFeNi high entropy alloys. JOM 67, 2340 (2015).CrossRefGoogle Scholar
Xia, S., Gao, M.C., Yang, T., Liaw, P.K., and Zhang, Y.: Phase stability and microstructures of high entropy alloys ion irradiated to high doses. J. Nucl. Mater. 480, 100 (2016).CrossRefGoogle Scholar
Senkov, O.N., Wilks, G.B., Miracle, D.B., Chuang, C.P., and Liaw, P.K.: Refractory high-entropy alloys. Intermetallics 18, 1758 (2010).CrossRefGoogle Scholar
Senkov, O.N., Scott, J.M., Senkova, S.V., Miracle, D.B., and Woodward, C.F.: Microstructure and room temperature properties of a high-entropy TaNbHfZrTi alloy. J. Alloys Compd. 509, 6043 (2011).CrossRefGoogle Scholar
Senkov, O.N., Wilks, G.B., Scott, J.M., and Miracle, D.B.: Mechanical properties of Nb25Mo25Ta25W25 and V20Nb20Mo20Ta20W20 refractory high entropy alloys. Intermetallics 19, 698 (2011).CrossRefGoogle Scholar
Zou, Y., Ma, H., and Spolenak, R.: Ultrastrong ductile and stable high-entropy alloys at small scales. Nat. Commun. 6, 7748 (2015).CrossRefGoogle ScholarPubMed
Rost, C.M., Sachet, E., Borman, T., Moballegh, A., Dickey, E.C., Hou, D., Jones, J.L., Curtarolo, S., and Maria, J.: Entropy-stabilized oxides. Nat. Commun. 6, 8485 (2015).CrossRefGoogle ScholarPubMed
Bérardan, D., Franger, S., Meena, A.K., and Dragoe, N.: Room temperature lithium superionic conductivity in high entropy oxides. J. Mater. Chem. A 4, 9536 (2016).CrossRefGoogle Scholar
Yeh, J.: Alloy design strategies and future trends in high-entropy alloys. JOM 65, 1759 (2013).CrossRefGoogle Scholar
Chang, S., Li, C., Chiang, S., and Huang, Y.: 4-nm thick multilayer structure of multi-component (AlCrRuTaTiZr)Nx as robust diffusion barrier for Cu interconnects. J. Alloys Compd. 515, 4 (2012).CrossRefGoogle Scholar
Braic, V., Balaceanu, M., Braic, M., Vladescu, A., Panseri, S., and Russo, A.: Characterization of multi-principal-element (TiZrNbHfTa)N and (TiZrNbHfTa)C coatings for biomedical applications. J. Mech. Behav. Biomed. Mater. 10, 197 (2012).CrossRefGoogle ScholarPubMed
Tsai, D., Deng, M., Chang, Z., Kuo, B., Chen, E., Chang, S., and Shieu, F.: Oxidation resistance and characterization of (AlCrMoTaTi)–Six–N coating deposited via magnetron sputtering. J. Alloys Compd. 647, 179 (2015).CrossRefGoogle Scholar
Sheng, W., Yang, X., Wang, C., and Zhang, Y.: Nano-crystallization of high-entropy amorphous NbTiAlSiWxNy films prepared by magnetron sputtering. Entropy 18, 226 (2016).CrossRefGoogle Scholar
Sheng, W., Yang, X., Zhu, J., Wang, C., and Zhang, Y.: Amorphous phase stability of NbTiAlSiNx high-entropy films. Rare Met. 37, 682 (2018).CrossRefGoogle Scholar
Zhang, W., Liaw, P.K., and Zhang, Y.: Science and technology in high-entropy alloys. Sci. China Mater. 61, 2 (2018).CrossRefGoogle Scholar
Chen, T., Wong, M., Shun, T., and Yeh, J.: Nanostructured nitride films of multi-element high-entropy alloys by reactive DC sputtering. Surf. Coat. Technol. 200, 1361 (2005).CrossRefGoogle Scholar
Lai, C., Lin, S., Yeh, J., and Chang, S.: Preparation and characterization of AlCrTaTiZr multi-element nitride coatings. Surf. Coat. Technol. 201, 3275 (2006).CrossRefGoogle Scholar
Lin, C.H., Duh, J.G., and Yeh, J.W.: Multi-component nitride coatings derived from Ti–Al–Cr–Si–V target in RF magnetron sputter. Surf. Coat. Technol. 201, 6304 (2007).CrossRefGoogle Scholar
Tsai, M., Lai, C., Yeh, J., and Gan, J.: Effects of nitrogen flow ratio on the structure and properties of reactively sputtered (AlMoNbSiTaTiVZr)Nx coatings. J. Phys. D: Appl. Phys. 41, 235402 (2008).CrossRefGoogle Scholar
Liu, L., Zhu, J.B., Hou, C., Li, J.C., and Jiang, Q.: Dense and smooth amorphous films of multicomponent FeCoNiCuVZrAl high-entropy alloy deposited by direct current magnetron sputtering. Mater. Des. 46, 675 (2013).CrossRefGoogle Scholar
Yang, X. and Zhang, Y.: Prediction of high-entropy stabilized solid-solution in multi-component alloys. Mater. Chem. Phys. 132, 233 (2012).CrossRefGoogle Scholar
Xie, L., Brault, P., Thomann, A., Yang, X., Zhang, Y., and Shang, G.: Molecular dynamics simulation of Al–Co–Cr–Cu–Fe–Ni high entropy alloy thin film growth. Intermetallics 68, 78 (2016).CrossRefGoogle Scholar
Takeuchi, A. and Inoue, A.: Classification of bulk metallic glasses by atomic size difference, heat of mixing and period of constituent elements and its application to characterization of the main alloying element. Mater. Trans. 46, 2817 (2005).CrossRefGoogle Scholar
Tsai, C., Lai, S., Cheng, K., Tsai, M., Davison, A., Tsau, C., and Yeh, J.: Strong amorphization of high-entropy AlBCrSiTi nitride film. Thin Solid Films 520, 2613 (2012).CrossRefGoogle Scholar
Ishii, A., Iwase, A., Fukumoto, Y., Yokoyama, Y., Konno, T.J., and Hori, F.: Effect of thermal annealing on the local structure in ZrCuAl bulk metallic glass. J. Alloys Compd. 504, S230 (2010).CrossRefGoogle Scholar
Berg, S., Blom, H.O., Larsson, T., and Nender, C.: Modeling of reactive sputtering of compound materials. J. Vac. Sci. Technol., A 5, 202 (1987).CrossRefGoogle Scholar
Van Steenberge, N., Concustell, A., Sort, J., Das, J., Mattern, N., Gebert, A., Suriñach, S., Eckert, J., and Baró, M.D.: Microstructural inhomogeneities introduced in a Zr-based bulk metallic glass upon low-temperature annealing. Mater. Sci. Eng., A 491, 124 (2008).CrossRefGoogle Scholar
Stoica, M., Van Steenberge, N., Bednarčik, J., Mattern, N., Franz, H., and Eckert, J.: Changes in short-range order of Zr55Cu30Al10Ni5 and Zr55Cu20Al10Ni10Ti5 BMGs upon annealing. J. Alloys Compd. 506, 85 (2010).CrossRefGoogle Scholar
Falk, M.L. and Langer, J.S.: Dynamics of viscoplastic deformation in amorphous solids. Phys. Rev. E 57, 7192 (1998).CrossRefGoogle Scholar