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Measurement and interpretation of strain relaxation in passivated Al–0.5% Cu lines

Published online by Cambridge University Press:  31 January 2011

Paul R. Besser ,
Thomas N. Marieb ,
Jin Lee ,
Paul A. Flinn  and
John C. Bravman
Paul R. Besser
Affiliation:
Thin Films Advanced Process Development, Advanced Micro Devices, Inc., One AMD Place, Sunnyvale, California 94088
Thomas N. Marieb
Affiliation:
Components Research, Intel Corporation, 3065 Bowers Avenue, Santa Clara, California 95033
Jin Lee
Affiliation:
Components Research, Intel Corporation, 3065 Bowers Avenue, Santa Clara, California 95033
Paul A. Flinn
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, California 94305, and Components Research, Intel Corporation, 3065 Bowers Avenue, Santa Clara, California 95033
John C. Bravman
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, California 94305
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Abstract

X-ray diffraction has been used to measure the strain relaxation in passivated Al–0.5% Cu lines at 200 °C after cooling directly from an anneal at the passivation deposition temperature of 380 °C. Fits to the measured X, Y, and Z components of strain are summed to obtain the hydrostatic component, which exhibits a decay over time. Three mechanisms are considered to explain the decay of the hydrostatic strain in the metal line: Cu precipitation from the solid solution, the presence and growth of voids in the lines, and time-dependent deformation of the passivation. Calculations of the effect of Cu precipitation from the solid solution demonstrate that it plays an insignificant role in the relaxation. A high-voltage scanning electron microscope is used to image the presence and growth of voids through the passivation. The time scale of the growth of stress-induced voids is not the same as the hydrostatic relaxation, indicating that voiding is not solely responsible for the observed relaxation. The relaxation of the line is modeled using a time-dependent finite element model, allowing elastic compliance of the passivation. The magnitude of the calculated relaxation agrees with the measurements. It is suggested that a combination of voiding and passivation compliance is responsible for the measured hydrostatic strain relaxation in the metal line.

Type
Articles
Information
Journal of Materials Research , Volume 11 , Issue 1 , January 1996 , pp. 184 - 193
Copyright
Copyright © Materials Research Society 1996

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