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Indentation responses of time-dependent films on stiff substrates

Published online by Cambridge University Press:  03 March 2011

Michelle L. Oyen ,
Robert F. Cook ,
John A. Emerson  and
Neville R. Moody
Michelle L. Oyen*
Affiliation:
Department of Biophysical Sciences and Medical Physics, University of Minnesota, Minneapolis, Minnesota 55455
Robert F. Cook
Affiliation:
Materials Science and Engineering, University of Minnesota, Minneapolis, Minnesota 55455
John A. Emerson
Affiliation:
Sandia National Laboratories Albuquerque, New Mexico 87185
Neville R. Moody
Affiliation:
Sandia National Laboratories Livermore, California 94551
*
a) Address all correspondence to this author. e-mail: MichelleLOyen@aol.com
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Abstract

A viscous-elastic-plastic indentation model was extended to a thin-film system, including the effect of stiffening due to a substrate of greater modulus. The system model includes a total of five material parameters: three for the film response (modulus, hardness, and time constant), one for the substrate response (modulus), and one representing the length-scale associated with the film-substrate interface. The substrate influence is incorporated into the elastic response of the film through a depth-weighted elastic modulus (based on a series sum of film and substrate contributions). Constant loading- and unloading-rate depth-sensing indentation tests were performed on polymer films on glass or metal substrates. Evidence of substrate influence was examined by normalization of the load-displacement traces. Comparisons were made between the model and experiments for indentation tests at different peak load levels and with varying degrees of substrate influence. A single set of five parameters was sufficient to characterize and predict the experimental load-displacement data over a large range of peak load levels and corresponding degrees of substrate influence.

Keywords

PolymerThin filmMechanical properties
Type
Articles
Information
Journal of Materials Research , Volume 19 , Issue 8 , August 2004 , pp. 2487 - 2497
Copyright
Copyright © Materials Research Society 2004

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References

REFERENCES

1.Oliver, W.C. and Pharr, G.M.: An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments. J. Mater. Res. 7, 1564 (1992).Google Scholar
2.Chou, T.C., Nieh, T.G., Tsui, T.Y., Pharr, G.M. and Oliver, W.C.: Mechanical properties and microstructures of metal-ceramic microlaminates. I. Nb/MoSi2 systems. J. Mater. Res. 7, 2765 (1992).CrossRefGoogle Scholar
3.Hay, J.C., Sun, E.Y., Pharr, G.M., Becher, P.F. and Alexander, K.B.: Elastic anisotropy of beta-silicon nitride whiskers. J. Am. Ceram. Soc. 81, 2661 (1998).CrossRefGoogle Scholar
4.Davidson, D.L. and Pharr, G.M.: Matrix properties of textile reinforced ceramic-matrix composites measured by nanoindentation. J. Compos. Technol. Res. 23, 102 (2001).Google Scholar
5.Thurn, J., Morris, D.J. and Cook, R.F.: Depth-sensing indentation at macroscopic dimensions. J. Mater. Res. 17, 2679 (2002).CrossRefGoogle Scholar
6.Oyen, M.L. and Cook, R.F.: Load-displacement behavior during sharp indentation of viscous-elastic-plastic materials. J. Mater. Res. 18, 139 (2003).CrossRefGoogle Scholar
7.Briscoe, B.J., Fiori, L. and Pelillo, E.: Nano-indentation of polymeric surfaces. J. Phys. D: Appl. Phys. 31, 2395 (1998).Google Scholar
8.Chudoba, T. and Richter, F.Investigation of creep behavior under load during indentation experiments and its influence on hardness and modulus results. Surf. Coat. Technol. 148, 191 (2001).Google Scholar
9.Feng, G. and Ngan, A.H.W.: Effects of creep and thermal drift on modulus measurement using depth-sensing indentation. J. Mater. Res. 17, 660 (2002).CrossRefGoogle Scholar
10.Cheng, L., Xia, X., Yu, W., Scriven, L.E. and Gerberich, W.W.: Flat-punch indentation of a viscoelastic material. J. Polym. Sci. B: Polym. Phys. 38, 10 (2000).3.0.CO;2-6>CrossRefGoogle Scholar
11.Sakai, M. and Shimizu, S.Indentation rheometry for glass-forming materials. J. Non-Cryst. Solids 282, 236 (2001).CrossRefGoogle Scholar
12.Saha, R. and Nix, W.D.Effects of the substrate on the determination of thin films mechanical properties by nanoindentation. Acta Mater. 50, 23 (2002).CrossRefGoogle Scholar
13.Doerner, M.F. and Nix, W.D.: A method for interpreting the data from depth-sensing indentation instruments. J. Mater. Res. 1, 601 (1986).CrossRefGoogle Scholar
14.King, R.B.: Elastic analysis of some punch problems for a layered medium. Int. J. Solids Struct . 23, 1657 (1987).CrossRefGoogle Scholar
15.Mencik, J., Munz, D., Quandt, E., Weppelman, E.R. and Swain, M.V.: Determination of elastic modulus of thin layers using nanoindentation. J. Mater. Res. 12, 2475 (1997).CrossRefGoogle Scholar
16.Jager, I.L.: Comment on: ‘Effects of the substrate on the determination of thin films mechanical properties by nanoindentation’ by Saha and Nix [Acta Mater 2002;50:23]. Scripta Mater . 47, 429 (2002).CrossRefGoogle Scholar
17.Ogilvy, J.A.: A parametric elastic model for indentation testing of thin films. J. Phys. D: Appl. Phys. 26, 2123 (1993).CrossRefGoogle Scholar
18.Rar, A., Song, H. and Pharr, G.M. Assessment of new relation for the elastic compliance of a film-substrate system, in Thin Films: Stresses and Mechanical Properties IX, edited by Ozkan, C.S., Freund, L.B., Cammarata, R.C., and Gao, H. (Mater. Res. Soc. Symp. Proc. 695, Warrendale, PA, 2002). L10.10.1, p. 431Google Scholar
19.Perriot, A. and Barthel, E.: Elastic contact to a coated half space: Effective elastic modulus and real penetration. J. Mater. Res. 19, 600 (2004).CrossRefGoogle Scholar
20.Yoder, K.B., Ahuja, S., Dihn, K.T., Crowson, D.A., Corcoran, S.G., Cheng, L. and Gerberich, W.W.: Nanoindentation of viscoelastic materials: Mechanical properties of polymer coatings on aluminum substrates, in Fundamentals of Nanoindentation and Nanotribology, edited by Moody, N.R., Gerberich, W.W., Burnham, N., and Baker, S.P. (Mater. Res. Soc. Symp. Proc. 522,Warrendale, PA, 1998), p. 205Google Scholar
21.Toivola, Y., Thurn, J. and Cook, R.F.: Structure, electrical, and mechanical properties development during curing of low-k hydrogen silsesquioxane films. J. Electrochem. Soc. 149 F9 (2002).CrossRefGoogle Scholar
22.Strojny, A. and Gerberich, W.W.: Experimental analysis of viscoelastic behavior in nanoindentation, in Fundamentals of Nanoindentation and Nanotribology, edited by Moody, N.R., Gerberich, W.W., Burnham, N., and Baker, S.P. (Mater. Res. Soc. Symp. Proc. 522,Warrendale, PA, 1998), p. 159Google Scholar
23.Xia, X., Strojny, A., Scriven, L.E., Gerberich, W.W., Tsou, A. and Anderson, C.C.: Constitutive property evaluation of polymeric coatings using nanomechanical methods, in Fundamentals of Nanoindentation and Nanotribology, edited by Moody, N.R., Gerberich, W.W., Burnham, N., and Baker, S.P. (Mater. Res. Soc. Symp. Proc. 522,Warrendale, PA, 1998), p. 199Google Scholar
24.Krupicka, A., Johannson, M. and Hult, A.: Viscoelasticity in polymer films on rigid substrates. Macromol. Mater. Eng. 288, 108 (2003).Google Scholar
25.Sakai, M.: The Meyer hardness: A measure for plasticity? J. Mater. Res. 14, 3630 (1999).Google Scholar
26.Moody, N.R., Reedy, E.D. Jr. and Kent, M.S. Physical basis for interfacial traction-separation models. Report SAND2002-8567, November 2002, Sandia National, Laboratories, Albuquerque, NM 87185 and Livermore, CA 94550Google Scholar
27.Emerson, J.A., Giunta, R.K., Reedy, D.E., Adams, D.P., Lemke, P.A. and Moody, N.R. Process-based quality tools to verify cleaning and surface preparation. Report SAND2003-1591, May, 2003, Sandia National, Laboratories, Albuquerque, NM 87185 and Livermore, CA 94550Google Scholar
28.Kent, M.S., Reedy, E.D. Jr. and Stevens, M.J. Molecular-to-continuum fracture analysis of thermosetting polymer/solid interfaces. Report SAND2000-0026, November 2002, Sandia National, Laboratories, Albuquerque, NM 87185 and Livermore, CA 94550CrossRefGoogle Scholar
29.Herakovich, C.T.: Mechanics of Fibrous Composites. Wiley, (c) 1997Google Scholar
30.Sneddon, I.N.: The relation between load and penetration in the axisymmetric Boussinesq problem for a punch of arbitrary profile. Int. J. Engng. Sci. 3, 47 (1965).Google Scholar
31.Findley, W.N., Lai, J.S. and Onaran, K.: Creep and relaxation of nonlinear viscoelastic materials. (Dover Publications Inc., New York, 1989)Google Scholar
32.Shimizu, S., Yanagimoto, T. and Sakai, M.: Pyramidal indentation load-depth curve of viscoelastic materials. J. Mater. Res. 14, 4075 (1999).CrossRefGoogle Scholar
33.van Melick, H., van Duken, A., Toonder, J. den, Govaert, L. and Meijer, H.: Near-surface mechanical properties of amorphous polymers. Philos. Mag. A. 82, 2093 (2002).CrossRefGoogle Scholar