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Growth of aligned multiwalled carbon nanotubes on bulk copper substrates by chemical vapor deposition

  • Ge Li (a1), Supriya Chakrabarti (a1), Mark Schulz (a2) and Vesselin Shanov (a1)

Abstract

Successful growth of vertically aligned carbon nanotube (CNT) arrays on copper substrate by thermal chemical vapor deposition is reported in this paper. The effects of Ti, Ni, and Ni–Cr intermediate layers have been studied to eliminate cracking of the copper surface during the synthesis of CNTs. It was found that these intermediate layers play a critical role in achieving vertical alignment of CNTs on copper substrates. The effects of other reaction parameters such as flow rate of ethylene, concentration of water vapor, and deposition temperature have also been studied. Scanning electron microscopy, transmission electron microscopy, and micro-Raman spectroscopy were used to evaluate the quality and nature of the CNT formed.

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1Kordás, K., Tóth, G., Moilanen, P., Kumpumaäki, M., Vaähaäkangas, J., Uusimaäki, A., Vajtaia, R. and Ajayan, P.M.: Chip cooling with integrated carbon nanotube microfin architectures. Appl. Phys. Lett. 90, 123105 (2007)
2Masarapu, C. and Wei, B.: Direct growth of aligned multiwalled carbon nanotubes on treated stainless street substrates. Langmuir 23, 9046 (2007)
3Chai, Y., Gong, J., Zhang, K., Philip, C., Chan, H. and Yuen, F.: Flexible transfer to aligned carbon nanotube films for integration at lower temperature. Nanotechnology 18, 5 (2007)
4Kumar, A., Pushparaj, V.L., Kar, S., Nalamasu, O., Ajayan, P.M. and Baskarana, R.: Contact transfer of aligned carbon nanotube arrays onto conducting substrates. Appl. Phys. Lett. 89, 163120 (2006)
5Yin, K.B., Xia, Y.D., Chan, C.Y., Zhang, W.Q., Wang, Q.J., Zhao, X.N., Li, A.D., Liu, Z.G., Bayes, M.W. and Yee, K.W.: The kinetics and mechanism of room-temperature microstructural evolution in electroplated copper foils. Scr. Mater. 58, 65 (2008)
6Gao, L., Peng, A., Wang, Z.Y., Zhang, H., Shi, Z., Gu, Z., Cao, G. and Ding, B.: Growth of aligned carbon nanotube arrays on metallic substrate and its application to supercapacitors. Solid State Commun. 146, 380 (2008)
7Talapatra, S., Kar, S., Pal, S.K., Vajtai, R., Cl, L., Victor, P., Shaijumon, M.M., Kaur, S., Nalamasu, O. and Ajayan, P.M.: Direct growth of aligned carbon nanotubes on bulk metals. Nature Nanotechnology 1, 112 (2006)
8Yun, Y., Gollapudi, R., Shanov, V., Schulz, M. and Dong, Z.: Carbon nanotubes grown on stainless steel to form plate and probe electrodes for chemical/biological sensing. J. Nanosci. Nanotechnol. 7, 1 (2007)
9Lin, N., Wang, H., Dixit, P., Xu, T., Zhang, S. and Miao, J.: Investigation of carbon nanotube growth on multimetal layers for advanced interconnect applications in microelectronic devices. J. Electrochem. Soc. 156, K23 (2009).
10Wang, H., Feng, J.Y., Hu, X.J. and Ng, K.M.: Synthesis of aligned carbon nanotubes on double-sided metallic substrate by chemical vapor deposition. J. Phys. Chem. C 111, 12617 (2007)
11Brongersma, S.H. and Richard, E.: Two-step room temperature grain growth in electroplated copper. J. Appl. Phys. 86, 3642 (1999)
12Arcos, T. de los, Garnier, M.G., Seo, J.W., Oelhafen, P., Thommen, V. and Mathys, D.: The influence of catalyst chemical state and morphology on carbon nanotube growth. J. Phys. Chem. B 108, 7728 (2004)
13Chakrabarti, S., Pan, L., Nagasaka, T. and Nakayama, Y.: Number of walls controlled synthesis of millimeter-long vertically aligned brushlike carbon nanotubes. J. Phys. Chem. C 111, 1929 (2007)
14Naoto, K., Hiroyuki, U. and Toshie, O.: XPS characterization and optical properties of Si/SiO2, Si/Al2O3 and Si/MgO co-sputtered films. Solid Films 325, 130 (1998)
15Nagaraju, N., Fonseca, A., Konya, Z. and Nagy, J.B.: Alumina and silica supported metal catalysts for production of carbon nano-tubes. J. Mol. Catal. A: Chem. 181, 57 (2002)
16Arcos, T. de los, Wu, Z.M. and Oelhafen, P.: Is aluminum a suitable buffer layer for carbon nanotube growth? Chem. Phys. Lett. 380, 419 (2003)
17Ng, T., Chen, H., Koehne, B., Cassell, E.J., Li, M.A., Han, J. and Meyyappan, M.: Growth of carbon nanotubes: A combinatorial method to study the effects of catalysts and underlayers. J. Phys. Chem. B 107, 8484 (2003)
18de, T. los Arcos, Oelhafen, P., Mathys, D., Seo, J.W., Domingo, C., Garcia-Ramos, J.V. and Sanchez-Cortes, S.: Strong influence of buffer layer type on carbon nanotube characteristics. Carbon 2004, 187 (2004)
19DiLeo, R.A., Landi, B.J. and Raffaelle, R.P.: Purity assessment of multiwalled carbon nanotubes by Raman spectroscopy. J. Appl. Phys. 101, 064306 (2007)
20Behler, K., Osswald, S., Ye, H., Dimovski, S. and Gogotsi, Y.: Effect of thermal treatment on the structure of multi-wall carbon nanotubes. J. Nanopart. Res. 8, 11 (2006)
21Roberta, L., DiLeo, A. and Raffaelle, R.P.: Purity assessment of multiwalled carbon nanotubes by Raman spectroscopy. J. Appl. Phys. 101, 064307 (2007)
22Ouyang, Y., Cong, L.M., Chen, L., Liu, Q.X. and Fang, Y.: Raman study on single-walled carbon nanotubes and multi-walled carbon nanotubes with different laser excitation energies. Physica E 40, 2386 (2008)
23Yun, Y., Shanov, V., Ti, Y., Subramaniam, S. and Schulz, M.: Growth mechanism of long aligned multiwall carbon nanotube arrays by water-assisted chemical vapor deposition. J. Phys. Chem. B 110, 23920 (2006)
24Yu, Z., Chen, D., Todal, B., Zhao, T., Dai, Y., Yuan, W. and Holmen, A.: Catalytic engineering of carbon nanotube production. Appl. Catal, A 279, 223 (2005)
25Chakrabarti, S., Yoshikawa, Y., Pan, L. and Nakayama, Y.: Growth of super long aligned brush-like carbon nanotubes. Jpn. J. Appl. Phys. 45, 720 (2006)
26Futaba, D.N., Yamada, T., Mizuno, K., Yumura, M. and Iijima, S.: Kinetics of water-assisted single-walled carbon nanotube synthesis revealed by a time-evolution analysis. Phys. Rev. Lett. 95, 056104 (2005)

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Growth of aligned multiwalled carbon nanotubes on bulk copper substrates by chemical vapor deposition

  • Ge Li (a1), Supriya Chakrabarti (a1), Mark Schulz (a2) and Vesselin Shanov (a1)

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