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Growth of (111)-oriented Pb(Zr,Ti)O3 layers on nanocrystalline RuO2 electrodes using the sol-gel technique

Published online by Cambridge University Press:  26 November 2012

G. J. Norga ,
S. Jin ,
Laura Fè ,
D. J. Wouters ,
H. Bender  and
H. E. Maes
G. J. Norga*
Affiliation:
Interuniversity Microelectronics Center (IMEC), Kapeldreef 75, B3001 Leuven, Belgium
S. Jin
Affiliation:
Interuniversity Microelectronics Center (IMEC), Kapeldreef 75, B3001 Leuven, Belgium
Laura Fè
Affiliation:
Interuniversity Microelectronics Center (IMEC), Kapeldreef 75, B3001 Leuven, Belgium
D. J. Wouters
Affiliation:
Interuniversity Microelectronics Center (IMEC), Kapeldreef 75, B3001 Leuven, Belgium
H. Bender
Affiliation:
Interuniversity Microelectronics Center (IMEC), Kapeldreef 75, B3001 Leuven, Belgium
H. E. Maes
Affiliation:
Interuniversity Microelectronics Center (IMEC), Kapeldreef 75, B3001 Leuven, Belgium
*
a)Address all correspondence to this author. e-mail: norga@imec.be
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Abstract

The influence of the RuO2 bottom electrode microstructure on the texture and ferroelectric properties of sol-gel PZT in RuO2/PZT/RuO2/Pt capacitors is discussed. For high growth temperatures, RuO2 has a columnar microstructure and a mixed (100)/(110) texture, attributed to epitaxial growth on Pt(111) and TiO2 (110) grains of the preannealed Pt / Ti layer. The mixed orientation of RuO2 resulted in a mixed PZT texture and slanted ferroelectric hysteresis characteristic. As the RuO2 growth temperature was reduced, the microstructure of the RuO2 layer turned to fine-grained equiaxed, with a grain size of approximately 10 nm, and PZT developed a sharp (111) texture (I111/I100 > 100) resulting in a rectangular hysteresis characteristic and a remanent polarization >30 μC/cm2. The emergence of a strong (111) fiber texture in PZT on fine-grained RuO2 shed new light on the orientation selection mechanisms in sol-gel-prepared PZT layers. Possible applications of this phenomenon for high-density ferroelectric memories with a stacked layout are briefly discussed.

Type
Articles
Information
Journal of Materials Research , Volume 16 , Issue 3 , March 2001 , pp. 828 - 833
Copyright
Copyright © Materials Research Society 2001

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References

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