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Fabrication of Sr2Nb2O7 thin films by sol-gel processing

Published online by Cambridge University Press:  03 March 2011

Alamanda V. Prasadarao ,
Ulagaraj Selvaraj  and
Sridhar Komarnenici
Alamanda V. Prasadarao*
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, Pennsylvania 16802
Ulagaraj Selvaraj*
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, Pennsylvania 16802
Sridhar Komarnenici*
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, Pennsylvania 16802
*
a)Present address: School of Chemistry, Andhra University, AP 530003, India.
b)Present address: Partculate Materials Center, The Pennsylvania State University, University Park, Pennsylvania 16802.
c)Also with the Department of Agronomy.
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Abstract

Sol-gel Sr2Nb2O7 thin films were deposited on Si(100) and Pt-coated Si substrates for the first time by spin-coating. The Sr2Nb2O7 precursor solution was prepared from strontium metal dissolved in 2-methoxyethanol, acetylacetone, and niobium ethoxide. The formation of phase pure Sr2Nb2O7 occurred via an intermediate perovskite phase of composition close to Sr0.82NbO3. Crack-free Sr2Nb2O7 films of ∼0.4 μm thickness were deposited on these substrates using a single-coating followed by heat treatment at 850 °C for 12 h. SEM microstructure and thin film XRD results indicated the deposition of a grain-oriented film on the Pt-coated Si substrate. The room temperature dielectric constant and the loss values of the film measured at 10 kHz are 45 and 0.045, respectively.

Type
Articles
Information
Journal of Materials Research , Volume 10 , Issue 3 , March 1995 , pp. 704 - 707
Copyright
Copyright © Materials Research Society 1995

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